US 2020/0007108 A1 · TRIM LAYERS FOR SURFACE ACOUSTIC WAVE DEVICES

Abstract

Trim layers that are configured to adjust one or more operating parameters for surface acoustic wave (SAW) devices are disclosed. A SAW device may include an interdigital transducer (IDT) and a piezoelectric material that are configured to generate an acoustic wave and a trim layer that has an acoustic velocity and a density that correspond to a velocity of the acoustic wave. In this manner, the trim layer may be configured to adjust an electromechanical coupling of the SAW device without significantly impacting a resonance frequency of the SAW device. The SAW device may also include an additional trim layer that is configured to adjust a coupling percentage and the resonance frequency of the SAW device. A SAW device may include a trim layer that is configured to adjust certain operating parameters by greater amounts than other operating parameters.

Claims26

Dependent claims

A surface acoustic wave (SAW) device, comprising:

a piezoelectric material;
an interdigital transducer (IDT) on the piezoelectric material;
a first trim layer that is configured to cover the IDT and at least a portion of the piezoelectric material that is not covered by the IDT, wherein the first trim layer is configured to adjust a first operating parameter of the SAW device;
and
a second trim layer that is configured to cover the IDT and at least a portion of the piezoelectric material that is not covered by the IDT, wherein the second trim layer is configured to adjust a second operating parameter while having a reduced impact on the first operating parameter.

2 more elements

Dependencies are inferred from the claim text.

Trim layers for surface acoustic wave devices

Life of this patent

Trim layers for surface acoustic wave devices

Life of this patent

Abstract

Claims26