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US 2020/0006382 A1Published application
Semiconductor memory device
AssigneeToshiba Memory Corporation
InventorsToshifumi MINAMI, Atsuhiro SATO, Keisuke YONEHAMA, Yasuyuki BABA, Hiroshi SHINOHARA, Hideyuki KAMATA, Teppei HIGASHITSUJI
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Abstract
A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
Claims10
A semiconductor memory device comprising:
- a plurality of first conducting layers and a plurality of first insulating layers that are alternately disposed in a first direction above a semiconductor substrate, each of the plurality of first conductive layers extending in a second direction crossing the first direction;
- a plurality of second conductive layers and a plurality of second insulating layers that are alternately disposed in the first direction above the semiconductor substrate, each of the plurality of second conductive layers extending in the second direction, each of the plurality of first conductive layers and each of the plurality of second conductive layers being arranged in a third direction crossing the first direction and the second direction;
- an insulating plate extending in the first direction and the second direction, the insulating plate being provided between the plurality of first conductive layers and the plurality of second conductive layers in the third direction;
- a first semiconductor member extending through the plurality of the first conductive layers in the first direction;
- and
- a second semiconductor member extending through the plurality of second conductive layers in the first direction,
- wherein each of the plurality of first conductive layers has a surface that faces the insulating plate and has a plurality of recessed portions arranged in the second direction.
4 more elements
Dependencies are inferred from the claim text.