Staircase structures for three-dimensional memory device double-sided routing
AssigneeYangtze Memory Technologies Co., Ltd.
InventorShao-Fu Sanford Chu
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorShao-Fu Sanford Chu
Estimating the term…
Embodiments of staircase structures for three-dimensional (3D) memory devices double-sided routing are disclosed. In an example, a 3D memory device includes a substrate, a memory stack disposed above the substrate and including conductor/dielectric layer pairs stacked alternatingly, and an array of memory strings each extending vertically through an inner region of the memory stack. An outer region of the memory stack includes a first staircase structure disposed on the substrate and a second staircase structure disposed above the first staircase structure. First edges of the conductor/dielectric layer pairs in the first staircase structure along a vertical direction away from the substrate are staggered laterally away from the array of memory strings. Second edges of the conductor/dielectric layer pairs in the second staircase structure along the vertical direction away from the substrate are staggered laterally toward the array of memory strings.
A three-dimensional (3D) memory device, comprising:
A three-dimensional (3D) memory device, comprising:
A three-dimensional (3D) memory device, comprising:
Dependencies are inferred from the claim text.