An apparatus and method for electrical test prediction
AssigneeNova Ltd.
InventorIGOR TUROVETS
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Abstract
A test site and method are herein disclosed for predicting E-test structure (in-die structure) and/or device performance. The test site comprises an E-test structure and OCD-compatible multiple structures in the vicinity of the E-test structure to allow optical scatterometry (OCD) measurements. The OCD-compatible multiple structures are modified by at least one modification technique selected from (a) multiplication type modification technique, (b) dummification type modification technique, (c) special Target design type modification technique, and (d) at least one combination of (a), (b) and (c) for having a performance equivalent to the performance of the E-test structure.
Claims22
A method for predicting E-test structure (in-die structure) and/or device performance comprising:
- providing an E-test structure and OCD-compatible multiple structures in the vicinity of said E-test structure to allow optical scatterometry (OCD) measurements;
- (ii) conducting optical scatterometric (OCD) measurements on said multiple structures;
- (iii) conducting electrical measurements on said E-test structure;
- (iv) establishing correlations between an OCD measurement data obtainable via said OCD measurements on said multiple structures and electrical parameters obtainable via said electrical measurements on said E-test structure;
- and
- (v) using said correlations for predicting the performance of said E-test structure.
A test site for predicting E-test structure (in-die structure) and/or device performance comprising an E-test structure and OCD-compatible multiple structures in the vicinity of said E-test structure to allow optical scatterometry (OCD) measurements, said OCD-compatible multiple structures modified by at least one modification technique selected from:
- (a) multiplication type modification technique;
- (b) dummification type modification technique;
- (c) special Target design type modification technique;
- and
- (d) at least one combination of (a), (b) and (c);
- for having a performance equivalent to the performance of said E-test structure.
Dependencies are inferred from the claim text.