Monitoring dry-etching of polymer layer for transferring semiconductor devices
AssigneeFacebook Technologies, LLC
InventorDaniel Brodoceanu
Life of this patent
Estimating the term…
Abstract
Embodiments relate to placing light emitting diodes from a carrier substrate to a target substrate. At least one LED is embedded in a polymer layer on a substrate. The polymer layer is etched between the at least one LED and the substrate. A thickness of the polymer layer is monitored during etching of the polymer layer. The etching of the polymer layer is terminated responsive to determining that the thickness of the polymer layer is in a target range or a target value. A pick-up-tool (PUT) is brought into contact with at least one surface of the at least one LED facing away from the substrate responsive to dry-etching the polymer layer, and the PUT is lifted with the at least one LED attached to the PUT.
Claims20
A method, comprising:
- etching a polymer layer between a substrate and at least one light emitting diode (LED) of a plurality of LEDs, the at least one LED embedded in the polymer layer;
- monitoring a thickness of the polymer layer during etching of the polymer layer;
- and
- terminating etching of the polymer layer responsive to determining that the thickness of the polymer layer is in a target range or substantially at a target value.
An apparatus, comprising:
- a plasma chamber in which a substrate having at least one LED embedded in a polymer layer is placed for performing etching operation on the polymer layer;
- an image capturing device outside the plasma chamber, the plasma chamber configured to capture an image of the at least one LED and at least a portion of the polymer layer;
- and
- a controller configured to determine a thickness of the polymer layer during etching of the polymer layer in the plasma chamber by processing the captured image, the controller configured to terminate the etching operation in the plasma chamber responsive to determining that the thickness is in a target range or substantially at a target value.
A non-transitory computer-readable storage medium storing processor executable instructions, the instructions storing instructions, when executed cause a processor to:
- Etch a polymer layer between at least one LED and a substrate, the at least one LED embedded in the polymer layer;
- monitor a thickness of the polymer layer during etching of the polymer layer;
- and
- terminate etching of the polymer layer responsive to determining that the thickness of the polymer layer is in a target range or substantially at a target value;
Dependencies are inferred from the claim text.