Transport system of semiconductor fabrication facility, associated movable container and method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFU-HSIEN LI, CHI-FENG TUNG, HSIANG YIN SHEN
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Abstract
A transport system of a semiconductor fabrication facility, including: a rail for carrying vehicle, a sensor installed on the rail, a controller and a power panel. The sensor is arranged to determine a zone and send a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to adjust a current in accordance with the output signal, wherein the current is output to a cable extending along the rail.
Claims20
A transport system of a semiconductor fabrication facility, comprising:
- a rail for carrying vehicle;
- a sensor installed on the rail, wherein the sensor determines a zone and sends a quantity information in response to a quantity of vehicles in the zone;
- a controller, arranged to send an output signal in accordance with the quantity information;
- and
- a power panel, arranged to adjust a current in accordance with the output signal, wherein the current is output to a cable extending along the rail.
A movable container of a semiconductor fabrication facility, comprising:
- a driving mechanism, arranged to provide a momentum to the movable container for generating a displacement on a rail;
- and
- a back-up power mechanism, arranged to provide a back-up power at least to the driving mechanism.
A transport method of a semiconductor fabrication facility, comprising:
- determining a zone on a rail;
- sending a quantity information in response to a quantity of vehicles in the zone;
- sending an output signal in accordance with the quantity information;
- and
- adjusting a current in accordance with the output signal;
- outputting the output current to a cable extending along the rail.
Dependencies are inferred from the claim text.