Vacuum arrangement and method
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsTorsten DSAAK, Thomas MEYER, Bernd TEICHERT, Ralf BIEDERMANN
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Abstract
According to various embodiments, a vacuum arrangement may comprise the following: a first dehydration chamber and a second dehydration chamber, which are gas-separated from one another; a substrate transfer chamber for changing clocked substrate transport into continuous substrate transport towards the second dehydration chamber; a first high-vacuum pump of gas-transfer type for evacuating the first dehydration chamber; and a second high-vacuum pump of gas-binding type for evacuating the second dehydration chamber; wherein the first dehydration chamber is, with respect to the substrate transport, arranged between the second dehydration chamber and the substrate transfer chamber.
Claims11
Vacuum arrangement, comprising:
- a first dehydration chamber and a second dehydration chamber, which are gas-separated from one another;
- a substrate transfer chamber for changing clocked substrate transport into continuous substrate transport towards the second dehydration chamber;
- a first high-vacuum pump of gas-transfer type for evacuating the first dehydration chamber;
- and
- a second high-vacuum pump of gas-binding type for evacuating the second dehydration chamber;
- wherein the first dehydration chamber is, with respect to the substrate transport, arranged between the second dehydration chamber and the substrate transfer chamber.
Vacuum arrangement, comprising:
- a vacuum chamber which has a transport region;
- a high-vacuum pump of gas-binding type for evacuating the vacuum chamber;
- a transport device for the substrate transport through the transport region;
- a shield which is arranged between the high-vacuum pump and the transport region in order to shield the high-vacuum pump.
Method, comprising:
- transportation of at least one substrate from a first dehydration region into a second dehydration region, which are gas-separated from one another;
- dehydration of the substrate in the first dehydration region at a first pressure and in the second dehydration region at a second pressure;
- wherein the first pressure is higher than the second pressure and is provided by means of gas-transfer vacuum pumping;
- and
- wherein the second pressure is provided by means of gas-binding vacuum pumping.
Dependencies are inferred from the claim text.