Substrate holder

A substrate holder for holding a substrate by interposing the substrate between frames, the substrate holder comprising:

• a front frame;
• a rear frame;
• and
• one or a plurality of clampers that clamp the front frame and the rear frame, wherein
• one or a plurality of the clampers each include:
• a hook portion mounted on one of the front frame and the rear frame, the hook portion including a hook base and a hook main body, the hook main body being pivotably mounted on the hook base;
• and
• a plate mounted on another of the front frame and the rear frame, the plate including at least one claw configured such that the hook main body is hooked on the claw with a pivotal movement of the hook main body,
• at least one of one or a plurality of the clampers include the plate including a first claw and a second claw,
• the first claw is configured to allow the substrate holder to hold a substrate such that the hook main body is hooked on the first claw, and
• the second claw is configured such that a distance between the front frame and the rear frame when the hook main body is hooked on the second claw is larger than a distance between the front frame and the rear frame when the hook main body is hooked on the first claw.