Euv light source and apparatus for lithography
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Chih CHEN, Sheng-Kang YU, Chi YANG, Shang-Chieh CHIEN, Li-Jui CHEN, Po-Chung CHENG
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Abstract
An extreme ultraviolet (EUV) radiation source apparatus includes a collector and a target droplet generator for generating a tin (Sn) droplet. A debris collection device is disposed over a reflection surface of the collector, and at least one drip hole is located between the debris collection device and the collector. A tin bucket for collecting debris from the debris collection device is located below the at least one drip hole, and a tube or guide rod extends from the drip hole to the tin bucket.
Claims20
An extreme ultraviolet (EUV) radiation source apparatus, comprising:
- a collector;
- a target droplet generator for generating a tin (Sn) droplet;
- a debris collection device disposed over a reflection surface of the collector;
- at least one drip hole located between the debris collection device and the collector;
- a tin bucket for collecting debris from the debris collection device located below the at least one drip hole;
- and
- a tube or guide rod extending from the drip hole to the tin bucket.
An extreme ultraviolet (EUV) radiation source apparatus, comprising:
- an ellipsoidal EUV reflector;
- a target droplet generator;
- a frustoconical-shaped debris collection mechanism disposed over the ellipsoidal EUV reflector, wherein the frustoconical-shaped debris collection mechanism comprises a plurality of vanes extending between an upper annular-shaped support frame and a lower annular-shaped support frame;
- a fluid passage located below the plurality of vanes;
- a receptacle located below the fluid passage;
- and
- a tube or rod extending from the fluid passage to the receptacle.
A method for generating an extreme ultraviolet (EUV) radiation, comprising:
- irradiating a tin droplet with laser light in an EUV radiation source apparatus, thereby creating the EUV radiation and tin debris;
- and
- heating a tube or guide rod between a drip hole and a tin bucket, thereby causing tin debris deposited about the drip hole to flow.
Dependencies are inferred from the claim text.