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US 2020/0004153 A1Published application
Dispensing Nozzle Design and Dispensing Method Thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei Chang Cheng, Chi-Hung Liao
Life of this patent
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Abstract
An apparatus for dispensing fluid includes a fluid source; a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source; and a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore.
Claims20
An apparatus for dispensing fluid, comprising:
- a fluid source;
- a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source;
- and
- a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore.
1 more element
An apparatus for semiconductor manufacturing, comprising:
- a wafer chuck;
- a dispensing outlet positioned above the wafer chuck, wherein the dispensing outlet includes at least two orifices, each orifice having a different cross-sectional shape;
- a delivery conduit coupled to a fluid source, wherein the delivery conduit is operable to couple with one of the at least two orifices for fluid communication;
- and
- a gas sprayer in a proximity region of the at least two orifices, wherein the gas sprayer is operable to spray a gas to increase an ambient pressure in the proximity region.
2 more elements
A method of dispensing fluid, comprising:
- providing a substrate;
- positioning a nozzle above the substrate;
- determining a cross-sectional shape of the nozzle;
- configuring the nozzle to have the determined cross-sectional shape;
- and
- applying a fluid to the substrate through the nozzle with the determined cross-sectional shape.
3 more elements
Dependencies are inferred from the claim text.