Radiation-sensitive composition and pattern-forming method

A radiation-sensitive composition comprising:

• a compound comprising a metal and an oxygen atom, the metal and the oxygen atom being bonded by a covalent bond;
• and
• a solvent composition,
• wherein
• the metal is a metal of an element belonging to any one of period 4 to period 7 of group 3 to group 15 in periodic table, and
• the solvent composition comprises:
• a first solvent having a viscosity at 20° C. of no greater than 10 mPa·s and a vapor pressure at 20° C. of no greater than 5 kPa;
• and
• a second solvent having a van der Waals volume of no greater than 150 Å3, and being different from the first solvent,
• the second solvent being:
• water;
• a monovalent alcohol represented by R1—OH;
• R2—COOH;
• or a combination thereof, wherein R1 represents a monovalent organic group having 1 to 4 carbon atoms, and R2 represents a monovalent organic group having 1 to 30 carbon atoms.