Probe Card Support Apparatus for Automatic Test Equipment
AssigneeReid-Ashman Manufacturing, Inc.
InventorScott Nelson
Life of this patent
Estimating the term…
Abstract
Various implementations of automatic test equipment are disclosed having a number of innovative features. In one implementation, the equipment includes a test head having a probe card support apparatus that provides stiffening support and/or planarization to the device under test (DUT) area of a probe card. In another implementation, the test head can include a planar surface and the wafer prober can include a corresponding planar surface. The planar surfaces can be brought into contact with each other to planarize the DUT area of the probe card and the wafer chuck in the wafer prober relative to each other.
Claims20
A test head comprising:
- a probe card support apparatus;
- wherein the probe card support apparatus is configured to be positioned over a device under test (DUT) area of a probe card and provide stiffening support and planarization to the DUT area of the probe card;
- and
- wherein the test head is configured to be used with an automated test unit to test electronic components.
A system comprising:
- a test head including a probe card support apparatus;
- and
- a probe card coupled to the test head, the probe card having a device under test (DUT) area;
- wherein the probe card support apparatus is positioned over and provides stiffening support and planarization to the DUT area of the probe card.
A system comprising:
- a wafer prober;
- a probe card coupled to the wafer prober, the probe card having a device under test (DUT) area;
- a probe card support apparatus extending over and providing stiffening support and planarization to the DUT area of the probe card;
- wherein the wafer prober is a top loading wafer prober.
Dependencies are inferred from the claim text.