Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method
AssigneeNikon Corporation
InventorsHirotomo YASHIMA, Fuminori HAYANO, Akitoshi KAWAI
Life of this patent
Estimating the term…
Abstract
A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
Claims11
1-27. (canceled)
A measurement processing device using an X-ray inspection device, comprising:
- a region information acquisition unit that detects X-rays passing through a partial region of a first specimen and acquires first region information related to a first region;
- an inclination detection unit that detects an inclination of the first specimen when acquiring the first region information;
- and
- a comparison unit that compares a standard inclination and the inclination of the first specimen detected by the inclination detection unit.
A measurement processing method comprising:
- acquiring, by detecting X-rays passing through a partial region of a first specimen, first region information related to a first region;
- detecting an inclination of the first specimen when acquiring the first region information;
- and
- comparing a standard inclination and the inclination of the first specimen that is detected.
A non-transitory computer-readable storage medium storing processor-readable instructions that cause a computer to execute a measurement process, the process comprising:
- acquiring, by detecting X-rays passing through a partial region of a first specimen, first region information related to a first region;
- detecting an inclination of the first specimen when acquiring the first region information;
- and
- comparing a standard inclination and the inclination of the first specimen that is detected.
Dependencies are inferred from the claim text.