Multi-axis force and torque sensor and robot having the same

A multi-axis force and torque sensor, comprising an upper sensing assembly and a lower sensing assembly stacked together, wherein

• the upper sensing assembly comprises:
• a first disk;
• a second disk;
• a first flexure element connected between the first disk and the second disk, the first flexure element configured to deflect in response to applied external force and torque in multiple directions;
• and
• a plurality of first signal pairs, each including a first signal emitter and a first signal receiver, wherein the first signal emitter is mounted on one of the first disk and the second disk, and the first signal receiver is mounted on the other of the first disk and the second disk and located corresponding to the first signal emitter;
• and
• the lower sensing assembly comprises:
• a third disk;
• a fourth disk;
• a second flexure element connected between the third disk and the fourth disk, of the second flexure element configured to deflect in response to applied external force and torque in multiple directions;
• and
• a plurality of second signal pairs, each including a second signal emitter and a second signal receiver, wherein the second signal emitter is mounted on one of the third disk and the fourth disk, and the second signal receiver is mounted on the other of the third disk and the fourth disk and located corresponding to the second signal emitter,
• wherein the first and second signal pairs are arranged differently such that the first signal pairs and the second signal pairs are configured to measure the applied external force and torque in multiple directions.

A robot comprising multiple links and an end effector successively connected, wherein the end effector comprises a multi-axis force and torque sensor configured to measure force and torque applied on the end effector, the multi-axis force and torque sensor including:

• a first supporting element;
• a second supporting element;
• a deformable component connected between the first supporting element and the second supporting element, the deformable component configured to deflect in response to applied external force and torque in multiple directions;
• and
• a plurality of signal pairs, each including a magnet and a hall effect detector,
• wherein the magnet is mounted on one of the first supporting element and the second supporting element,
• wherein the hall effect detector is mounted on the other of the first supporting element and the second supporting element, and is located corresponding to the respective magnet, and
• wherein the magnetization directions of the magnets of the plurality of signal pairs are different such that the plurality of signal pairs are capable of measuring force and torque applied on the first supporting element and the second supporting element in different directions.