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US 2020/0003618 A1Published application
Spectroscopic microscope and spectroscopic observation method
AssigneeNanophoton Corporation
InventorKatsumasa FUJITA
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Abstract
A spectroscopic microscope according to the present embodiment includes a light source that generates laser light that enters a sample, a multi-slit part having a plurality of slits through which signal light branched by the edge filter passes, the slits being arranged in the slit width direction, and a spectrometer that disperses the signal light having passed through the slits in the dispersion direction intersecting the slit length direction and detects the signal light with a two-dimensional array photodetector.
Claims13
A spectroscopic microscope comprising:
- a light source configured to generate light;
- a multi-slit part including a plurality of slits through which signal light from an illumination region of a sample illuminated with the light passes, the slits being arranged in a slit width direction;
- and
- a spectrometer configured to disperse the signal light that has passed through the slits in a dispersion direction intersecting a slit length direction and to detect the signal light with a two-dimensional array photodetector.
1 more element
A spectroscopic observation method comprising the steps of:
- generating light;
- guiding the light to a sample;
- causing signal light from an illumination region of the sample illuminated with the light to enter a multi-slit part having a plurality of slits arranged in a slit width direction;
- and
- dispersing the signal light having passed through the slits of the multi-slit part in a dispersion direction intersecting a slit length direction and detecting the signal light with a two-dimensional array photodetector.
2 more elements
Dependencies are inferred from the claim text.