Measuring device and fabricating apparatus
AssigneeRicoh Company, Ltd.
InventorsRyohsuke Nishi, Yasuaki YOROZU
Life of this patent
Estimating the term…
Abstract
A measuring device includes processing circuitry. The processing circuitry is configured to project a pattern light beam onto a measurement object; acquire, as measurement data, a projection image of the measurement object onto which the pattern light beam is projected; predict, using fabrication data for fabricating the measurement object, a probable image formed by projection of the pattern light beam onto the measurement object to form prediction data; correct the measurement data with the prediction data to form corrected data; and calculate three-dimensional data to the measurement object, using the corrected data.
Claims6
A measuring device comprising:
- processing circuitry configured to:
- project a pattern light beam onto a measurement object;
- acquire, as measurement data, a projection image of the measurement object onto which the pattern light beam is projected;
- predict, using fabrication data for fabricating the measurement object, a probable image formed by projection of the pattern light beam onto the measurement object to form prediction data;
- correct the measurement data with the prediction data to form corrected data;
- and
- calculate three-dimensional data to the measurement object, using the corrected data.
Dependencies are inferred from the claim text.