Shutter Monitoring System
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Yu LIAO, Shih-Chi Kuo, Tsai-Hao Hung, Tsung-Hsien Lee
Life of this patent
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Abstract
The present disclosure is directed to a method and system for monitoring a distance between a shutter and a reference point in a processing module. For example, the method includes moving a shutter relative to a substrate support in a wafer processing module and determining a distance between the shutter and a wall of the wafer processing module with a measurement device. In response to the distance being greater than a value, the method further includes transferring a substrate to the substrate support, and in response to the distance being equal to or less than the value, the method includes resetting the shutter.
Claims20
A wafer processing module, comprising:
- a substrate support configured to support a wafer;
- a shutter configured to move with respect to the substrate support, wherein the shutter is proximal to a component of the wafer processing module;
- and
- a measurement device configured to:
- measure a capacitance between the shutter and the component of the wafer processing module;
- and
- calculate a distance between the shutter and the component of the wafer processing module based on the measured capacitance.
The wafer processing module of claim wherein the measurement device is a capacitance meter.
A method, comprising:
- moving a shutter relative to a substrate support in a water processing module;
- determining a distance between the shutter and a wall of the wafer processing module with a measurement device;
- in response to the distance being greater than a value, transferring a substrate to the substrate support;
- and
- in response to the distance being equal to or less than the value, resetting the shutter.
A processing device, comprising:
- a substrate support;
- a shutter configured to move with respect to the substrate support, wherein the shutter is proximal to a component of the processing device;
- and
- a measurement device configured to determine a distance between the shutter and the component of the processing module.
Dependencies are inferred from the claim text.