Storage tank, and material vaporization device and liquid material supply device provided with storage tank
AssigneeHORIBA STEC, Co., Ltd.
InventorShinji Taniguchi
Life of this patent
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Abstract
The present invention is a storage tank including: a tank; a tank main body that stores a liquid material; a cover body that covers an opening of the tank main body; a support body that is positioned opposite to the cover body; a seal body that is sandwiched by a flange provided at the opening end of the tank main body and the cover body; and tightening members that tighten the cover body and the support body, and is capable of, even when the thickness of the flange provided at the opening end of the tank main body is thin, attaching the cover body on the flange while maintaining a contact property.
Claims9
A storage tank comprising:
- a tank main body that stores a storage object consisting of at least any one or both of liquid and a solid;
- a cover body that covers an opening of the tank main body;
- a support body that is positioned opposite to the cover body;
- and
- a tightening member that tightens the cover body and the support body, wherein
- the tank main body is provided with a flange at an opening end thereof, and
- the cover body and the support body are tightened by the tightening member in a state of sandwiching the flange.
Dependencies are inferred from the claim text.