Ultraviolet light activated oxidation process for the reduction of organic carbon in semiconductor process water
AssigneeEvoqua Water Technologies LLC
InventorsSteve D. Sitkiewitz, Gary M. Carmignani, Lee W. Frederick
Life of this patent
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Abstract
In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
Claims21
-9. (canceled)
A water treatment system, comprising:
- a source of semiconductor manufacturing water;
- a make-up system fluidly connected downstream of the source of semiconductor manufacturing water;
- a polish system fluidly connected downstream of the make-up system;
- a point of use fluidly connected downstream of the polish system;
- and
- an advanced oxidation process system fluidly connected between of the source of semiconductor manufacturing water and the point of use, the advanced oxidation comprising:
- a chemical reactor vessel;
- a persulfate addition system fluidly connected to the chemical reactor vessel;
- a light emitting device positioned within the chemical reactor vessel;
- and
- a total organic carbon analyzer configured to receive an input signal of a total organic carbon measurement and configured to provide an output signal to control the persulfate addition system in response to the input signal.
A method of producing treated water from untreated water with an advance oxidation system, the advanced oxidation system having a continuous stirred tank reactor fluidly connected to a source of the untreated water, a persulfate addition system configured to introduce persulfate into the continuous stirred tank reactor, and a plug flow reactor fluidly connected downstream from the continuous stirred tank reactor and having an ultraviolet lamp therein, comprising providing persulfate into a persulfate feed tank of the persulfate addition system, wherein the persulfate addition is regulated in response to a total organic carbon (TOC) of at least one of untreated water and treated water.
Dependencies are inferred from the claim text.