Device and methods for the transfer of chips from a source substrate onto a destination substrate
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsStéphane Caplet, Laurent Mollard
Life of this patent
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Abstract
A device for the transfer of chips from a source substrate onto a destination substrate, including: a source substrate having a lower surface and an upper surface; and a plurality of elementary chips arranged on the upper surface of the source substrate, wherein each elementary chip is suspended above the source substrate by at least one breakable mechanical fastener, said at least one breakable mechanical fastener having a lower surface fastened to the upper surface of the source substrate and an upper surface fastened to the lower surface of the chip.
Claims14
A device for the transfer of chips from a source substrate onto a destination substrate, comprising:
- a source substrate having a lower surface and an upper surface;
- and
- a plurality of elementary chips arranged on the upper surface of the source substrate,
- wherein each elementary chip is suspended above the source substrate by at least one breakable mechanical fastener, said at least one breakable mechanical fastener being entirely located under the chip and comprising:
- a first portion having a lower surface fastened to the upper surface of the source substrate and an upper surface separated from the lower surface of the chip by a region free of any solid material;
- a second portion having an upper surface fastened to the lower surface of the chip and a lower surface separated from the upper surface of the source substrate by a region free of any solid material;
- and
- a third portion extending from a lateral edge of the first portion to a lateral edge of the second portion, the third portion having a lower surface separated from the source substrate by a region free of any solid material and an upper surface separated from the chip by a region free of any solid material.
Dependencies are inferred from the claim text.