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US 2019/0391007 A1Published application
Photoresist Spectral Sensitivity Matching Radiometer For Trace/Space Width Variation Improvement
AssigneeHutchinson Technology Incorporated
InventorsMatthew S. Lang, Lawrence E. LaLonde, Kyle T. Tobias
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Abstract
A radiometer probe for matching a spectral sensitivity of a dry-film resist is provided. The radiometer probe includes a light probe and a filter-diffuser assembly connected to the light probe. The filter-diffuser assembly includes a filter housing configured to receive an optical diffuser positioned on a filter. The optical diffuser and the filter are separated by a spacer.
Claims20
A radiometer probe for matching a spectral sensitivity of a dry-film resist comprising:
- a light probe;
- and
- a filter-diffuser assembly connected to the light probe, the filter-diffuser assembly including a filter housing configured to receive an optical diffuser positioned on a filter, the optical diffuser and the filter are separated by a spacer such that the radiometer probe is configured to expose a pattern on the dry-film resist to form a space between at least one set of adjacent structures of less than 12 microns.
A method for calibrating a radiometer probe, the method comprising:
- implementing a radiometer probe including a light probe and a filter-diffuser assembly threaded onto the light probe, the filter-diffuser assembly including a filter housing configured to receive an optical diffuser positioned on a filter, wherein the optical diffuser and the filter are separated by a spacer;
- implementing a light source;
- and
- placing the radiometer probe under the light source and measuring an irradiance;
- comparing the measured irradiance with a standard irradiance;
- and
- calibrating the radiometer probe based on the compared measured irradiance with the standard irradiance such that the radiometer probe is configured to expose a pattern on the dry-film resist to form a space between at least one set of adjacent structures of less than 12 microns.
4 more elements
Dependencies are inferred from the claim text.