Purification process for production of ultra high purity carbon monoxide
AssigneeLinde Aktiengesellschaft
InventorDavid Milner
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Abstract
Methods and apparatus for the production of ultra high purity carbon monoxide having a carbon dioxide content of 0.1 ppm or less is disclosed. Carbon dioxide is removed from a product stream using a reversing heat exchanger to freeze the carbon dioxide out of the product stream, This provides the ultra high purity carbon monoxide product which meets the requirements of the electronic industry applications.
Claims8
A method of producing ultra high purity carbon monoxide characterized in that a carbon monoxide stream is cooled in a reversing heat exchanger for freezing out removing carbon dioxide and whereas the gas stream is afterwards directed to a snow trap for removing solid particles and Whereas the gas stream is after the snow trap direct to a liquefier and hydrogen removal vessel, wherein the carbon monoxide is liquefied and hydrogen remains in a gaseous state and is separated.
An apparatus for producing ultra high purity carbon monoxide characterized in that the apparatus comprises a heat exchanger, which is connected to a snow trap, which is also connected to a liquefier and hydrogen removal vessel.
Dependencies are inferred from the claim text.