Simplified lamp design
AssigneeApplied Materials, Inc.
InventorJoseph M. RANISH
Life of this patent
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Abstract
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.
Claims20
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;
- an insulative sleeve coupled to the first lead and spaced apart from the press seal;
- a conductive cap or pin coupled to the insulative sleeve;
- and
- a fuse electrically coupling the first lead to the conductive cap or pin.
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead, the first lead electrically coupled to the filament within the press seal and extending from the press seal;
- an insulative sleeve coupled to the press seal, wherein the first lead extends into the insulative sleeve;
- a conductive element coupled to the insulative sleeve;
- and
- a fuse electrically coupling the first lead to the conductive pin.
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead, the first lead electrically coupled to the filament within the press seal and extending from the press seal;
- a first insulative sleeve coupled to the first lead external to the press seal, the first insulative sleeve spaced apart from the press seal;
- a conductive cap or pin coupled to the insulative sleeve;
- and
- a fuse electrically coupling the first lead to the conductive cap or pin.
Dependencies are inferred from the claim text.