# US 2019/0379833 A1 · Camera posture estimation method and substrate processing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0379833 A1 - Document ID: US20190379833A1 - Status: Published application - Kind: A1 - Application number: 16/437,016 - Filed: 2019-06-11 - Published: 2019-12-12 - Earliest claimed: 2018-06-11 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: SUNGYONG CHUN; OHYEOL KWON; SUNG WOOK BAE - Web page: https://patentgrep.com/patent/US20190379833A1 ## CPC - H04N 23/68: for stable pick-up of the scene, e.g. compensating for camera body vibrations - H04N 23/57: Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices - H04N 23/695: Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection} - H10P 72/53: {using optical controlling means} - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A method for estimating a posture of a camera installed in a substrate processing apparatus to obliquely photograph an object includes removing the remaining background other than a substrate and performing ellipse fitting, adjusting a yaw direction of the camera by using a difference between the center of a camera image and the center of an elliptical substrate image obtained by performing the ellipse fitting, adjusting a roll direction of the camera by using a tilt angle of an ellipse in the elliptical substrate image obtained by performing the ellipse fitting, and adjusting a pitch direction of the camera by using a ratio of a minor axis to a major axis of the ellipse in the elliptical substrate image obtained by performing the ellipse fitting. ## Claims ### Claim 1 A method for estimating a posture of a camera installed in a substrate processing apparatus to obliquely photograph an object, the method comprising: removing the remaining background other than a substrate and performing ellipse fitting; adjusting a yaw direction of the camera by using a difference between the center of a camera image and the center of an elliptical substrate image obtained by performing the ellipse fitting; adjusting a roll direction of the camera by using a tilt angle of an ellipse in the elliptical substrate image obtained by performing the ellipse fitting; and adjusting a pitch direction of the camera by using a ratio of a minor axis to a major axis of the ellipse in the elliptical substrate image obtained by performing the ellipse fitting. ### Claim 2 (depends on 1) The method of claim 1, wherein the adjusting of the yaw direction of the camera includes: identifying the center of the elliptical substrate image obtained by performing the ellipse fitting; calculating a distance difference between the center of the elliptical substrate image and a central pixel position of the camera image; and adjusting the yaw direction by the distance difference. ### Claim 3 (depends on 1) The method of claim 1, wherein the adjusting of the yaw direction of the camera includes: detecting a back nozzle installed in the center of a support unit configured to support the substrate, before performing the ellipse fitting; calculating a distance difference between a central pixel position of an image of the detected back nozzle and a central pixel position of the camera image; and adjusting the yaw direction by the distance difference. ### Claim 4 (depends on 1) The method of claim 1, wherein the adjusting of the roll direction of the camera includes: estimating a tilt angle of the elliptical substrate image obtained by performing the ellipse fitting; and adjusting the roll direction by the tilt angle. ### Claim 5 (depends on 1) The method of claim 1, wherein the adjusting of the pitch direction of the camera includes: measuring lengths of a major axis and a minor axis of the elliptical substrate image obtained by performing the ellipse fitting; calculating a pitch angle by using the measured lengths of the major and minor axes; and adjusting the pitch direction by a difference between a reference design angle and the calculated pitch angle. ### Claim 6 (depends on 1) The method of claim 1, wherein the adjusting of the roll direction, the pitch direction, or the yaw direction of the camera is independently performed. ### Claim 7 An apparatus for processing a substrate, the apparatus comprising: a process chamber having a processing space inside; a support unit configured to support the substrate in the process chamber; a gas supply unit configured to supply a process gas into the processing space; a plasma source configured to generate plasma from the process gas; a camera installed in the apparatus to obliquely photograph the substrate; and a controller configured to adjust a posture of the camera in a yaw, roll, or pitch direction by using the substrate supported on the support unit. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the controller includes a fitting unit configured to remove the remaining background other than the substrate photographed and perform ellipse fitting. ### Claim 9 (depends on 8) The apparatus of claim 8, wherein the controller includes a first controller configured to adjust the yaw direction of the camera, and wherein the first controller: identifies the center of an elliptical substrate image obtained by performing the ellipse fitting by the fitting unit; calculates a distance difference between the center of the elliptical substrate image and a central pixel position of an image taken with the camera; and adjusts the yaw direction by the distance difference. ### Claim 10 (depends on 8) The apparatus of claim 8, wherein the controller includes a first controller configured to adjust the yaw direction of the camera, and wherein the first controller: detects a back nozzle installed in the center of the support unit configured to support the substrate; calculates a distance difference between a central pixel position of an image of the detected back nozzle and a central pixel position of an image taken with the camera; and adjusts the yaw direction by the distance difference. ### Claim 11 (depends on 8) The apparatus of claim 8, wherein the controller includes a second controller configured to adjust the roll direction of the camera, and wherein the second controller: estimates a tilt angle of an elliptical substrate image obtained by performing the ellipse fitting by the fitting unit; and adjusts the roll direction by the tilt angle. ### Claim 12 (depends on 8) The apparatus of claim 8, wherein the controller includes a third controller configured to adjust the pitch direction of the camera, and wherein the third controller: measures lengths of a major axis and a minor axis of an elliptical substrate image obtained by performing the ellipse fitting by the fitting unit; calculates a pitch angle by using the measured lengths of the major and minor axes; and adjusts the pitch direction by a difference between a reference design angle and the calculated pitch angle. ### Claim 13 (depends on 8) The apparatus of claim 8, wherein the controller independently adjusts the roll direction, the pitch direction, or the yaw direction of the camera.