# US 2019/0378776 A1 · Apparatus having a functional structure delimited by a frame structure and method for producing same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0378776 A1 - Document ID: US20190378776A1 - Status: Published application - Kind: A1 - Application number: 16/433,278 - Filed: 2019-06-06 - Published: 2019-12-12 - Earliest claimed: 2018-06-07 - Assignees: Infineon Technologies AG - Applicants: Infineon Technologies AG - Inventors: Prashanth Makaram; John Cooper; Joerg Ortner; Stephan Pindl; Caterina Travan; Alexander Zoepfl - Web page: https://patentgrep.com/patent/US20190378776A1 ## CPC - H10W 74/137: {the encapsulations being directly on the semiconductor body (H10W74/134 takes precedence)} - H10P 14/6342: {Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating} - H10W 74/134: {the encapsulations being in grooves in the semiconductor body} - H10W 74/147: {the encapsulations being multilayered} - H10W 74/40: characterised by their materials - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An apparatus includes a semiconductor-based substrate with a functional structure that is formed in or on the semiconductor-based substrate. The apparatus includes a frame structure surrounding the functional structure and includes a coating that covers the functional structure and is delimited by the frame structure. ## Claims ### Claim 1 An apparatus, comprising: a semiconductor-based substrate having a functional structure formed in or on the semiconductor-based substrate; a frame structure surrounding the functional structure; and a coating that covers the functional structure and is delimited by the frame structure. ### Claim 2 (depends on 1) The apparatus as claimed in claim 1, wherein the coating completely covers an inner region of the frame structure. ### Claim 3 (depends on 1) The apparatus as claimed in claim 1, wherein the coating comprises a homogeneous coating. ### Claim 4 (depends on 1) The apparatus as claimed in claim 1, wherein the frame structure is arranged on a substrate side, and wherein the frame structure protrudes with respect to a substrate surface. ### Claim 5 (depends on 4) The apparatus as claimed in claim 4, wherein the frame structure has a height of at least 10 nm and at most 1000 μm. ### Claim 6 (depends on 1) The apparatus as claimed in claim 1, wherein the frame structure is arranged on a substrate side, and wherein the frame structure forms a trench in the substrate side. ### Claim 7 (depends on 6) The apparatus as claimed in claim 6, wherein the frame structure has a depth of at least 10 nm and at most 1000 μm. ### Claim 8 (depends on 1) The apparatus as claimed in claim 1, wherein the coating comprises a hydrophilic coating material and wherein the frame structure comprises a hydrophobic material. ### Claim 9 (depends on 1) The apparatus as claimed in claim 1, wherein the coating comprises a hydrophobic coating material and in which the frame structure comprises a hydrophilic material. ### Claim 10 (depends on 1) The apparatus as claimed in claim 1, wherein the frame structure comprises a frame width between an inner side of the frame structure and an outer side of the frame structure having a dimension of at least 10 nm and at most 10 mm. ### Claim 11 (depends on 1) The apparatus as claimed in claim 1, wherein the frame structure comprises an electrically conductive frame structure. ### Claim 12 (depends on 1) The apparatus as claimed in claim 1, wherein the frame structure comprises at least one first layer and one second layer. ### Claim 13 (depends on 1) The apparatus as claimed in claim 1, wherein the functional structure comprises an electrode structure. ### Claim 14 (depends on 1) The apparatus as claimed in claim 1, wherein the coating comprises a carbon nanomaterial. ### Claim 15 (depends on 1) The apparatus as claimed in claim 1, wherein the coating comprises at least one first layer and one second layer. ### Claim 16 (depends on 1) The apparatus as claimed in claim 1, wherein the frame structure comprises a structurable material. ### Claim 17 (depends on 1) The apparatus as claimed in claim 1, wherein the functional layer is configured to provide an electrically conductive function and/or a protective function against mechanical and/or chemical influences. ### Claim 18 (depends on 1) The apparatus as claimed in claim 1, comprising a chemosensor or a transistor. ### Claim 19 A method for producing a structure, the method comprising: providing a semiconductor-based substrate having a functional structure that is arranged in or on the semiconductor-based substrate; arranging a frame structure such that the frame structure surrounds the functional structure; and arranging a coating such that the coating covers the functional structure and is delimited by the frame structure. ### Claim 20 (depends on 19) The method as claimed in claim 19, wherein arranging the coating comprises: providing a liquid comprising a coating material; arranging the liquid in an inner region of the frame structure such that the liquid completely covers the inner region; and drying the inner region such that the coating material is left behind as the coating. ### Claim 21 (depends on 20) The method as claimed in claim 20, wherein the coating material comprises a first coating material, further comprising: arranging a second liquid in the inner region after the inner region has dried, wherein the second liquid comprises a second coating material; and drying the inner region again, such that the second coating material forms a layer on the coating. ### Claim 22 (depends on 19) The method as claimed in claim 19, wherein the substrate comprises a semiconductor wafer, and wherein the method is performed repeatedly on a wafer level.