# US 2019/0378736 A1 · Semiconductor Apparatus With Inner Wafer Carrier Buffer and Method

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- Number: US 2019/0378736 A1
- Document ID: US20190378736A1
- Status: Published application
- Kind: A1
- Application number: 16/548,449
- Filed: 2019-08-22
- Published: 2019-12-12
- Earliest claimed: 2012-09-20
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Jason Shen; Wen-Yu Huang; Li-Jen Ko; Hsiang Yin Shen
- Web page: https://patentgrep.com/patent/US20190378736A1

## CPC

- H10P 72/34: {the wafers being stored in a carrier, involving loading and unloading}
- H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)}
- H10P 72/0406: {for cleaning followed by drying, rinsing, stripping, blasting or the like}
- H10P 72/0466: {characterised by the construction of the load-lock chamber}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

The present disclosure provides one embodiment of a semiconductor processing apparatus. The semiconductor processing apparatus includes a load lock designed to receive a wafer carrier; an inner wafer carrier buffer configured to hold the wafer carrier received from the load lock and to perform a nitrogen purge to the wafer carrier; and a processing module designed to perform a semiconductor process to wafers from the wafer.

## Claims

### Claim 1

A method, comprising:
receiving a wafer carrier into a load lock, wherein the wafer carrier includes a semiconductor wafer;
moving the wafer carrier from the load lock to an inner wafer carrier buffer (IWCB) using a first transfer unit, wherein the first transfer unit is disposed outside the IWCB;
performing a nitrogen purge to the wafer carrier in the IWCB;
thereafter, moving the semiconductor wafer from the IWCB to a processing module using the first transfer unit and a second transfer unit different from the first transfer unit, wherein the second transfer unit is disposed outside both the IWCB and the processing module; and
performing a fabrication process to the semiconductor wafer in the processing module.

### Claim 2 (depends on 1)

The method of claim 1, further comprising providing an apparatus that includes a first enclosed region and a second enclosed region separated from and disposed adjacent the first enclosed region, wherein the first enclosed region includes the load lock, the IWCB, and the first transfer unit, and wherein the second enclosed region includes the processing module and the second transfer unit, and wherein receiving the wafer carrier includes moving the wafer carrier from outside the apparatus to the load lock.

### Claim 3 (depends on 1)

The method of claim 1, wherein moving the semiconductor wafer from the IWCB to the processing module includes:
moving the wafer carrier from the IWCB to a door disposed between the IWCB and the processing module using the first transfer unit; and
moving the semiconductor wafer out of the wafer carrier to the processing module through the door using the second transfer unit.

### Claim 4 (depends on 1)

The method of claim 1, wherein moving the wafer carrier from the load lock to the IWCB includes coupling a gas inlet and a gas outlet of the IWCB to corresponding ports of the wafer carrier.

### Claim 5 (depends on 1)

The method of claim 1, wherein moving the wafer carrier from the load lock to the IWCB includes coupling a pressurization device of the IWCB to a corresponding port of the wafer carrier.

### Claim 6 (depends on 5)

The method of claim 5, wherein performing the nitrogen purge includes controlling pressure of the wafer carrier in the IWCB.

### Claim 7 (depends on 1)

The method of claim 1, wherein performing the fabrication process includes applying a thermal oxidation process to the semiconductor wafer.

### Claim 8

A method, comprising:
loading a wafer carrier that includes a semiconductor wafer into a load lock from outside an apparatus, wherein the apparatus includes the load lock, an inner wafer carrier buffer (IWCB) configured to hold the wafer carrier, an outer transfer unit, an inner transfer unit, and a processing module configured to treat the semiconductor wafer;
transferring the wafer carrier from the load lock to the IWCB using the outer transfer unit;
performing a first treatment to the wafer carrier in the IWCB;
thereafter, transferring the semiconductor wafer from the IWCB to the processing module using the outer transfer unit and the inner transfer unit; and
performing a second treatment to the semiconductor wafer in the processing module, wherein the second treatment is different from the first treatment.

### Claim 9 (depends on 8)

The method of claim 8, wherein transferring the wafer carrier from the load lock to the IWCB includes coupling a gas inlet, a gas outlet, and a pressurization device of the IWCB to corresponding ports of the wafer carrier.

### Claim 10 (depends on 9)

The method of claim 9, wherein performing the first treatment includes:
applying nitrogen gas to the IWCB through the gas inlet;
removing the nitrogen gas from the wafer carrier through the gas outlet; and
controlling pressure of the nitrogen gas using the pressurization device.

### Claim 11 (depends on 8)

The method of claim 8, wherein transferring the semiconductor wafer from the IWCB to the processing module includes:
transferring the wafer carrier from the IWCB to a door disposed between the IWCB and the processing module using the outer transfer unit, wherein the outer transfer unit is separated from the load lock, the IWCB, and the processing module; and
thereafter, transferring the semiconductor wafer from the wafer carrier to the processing module through the door using the inner transfer unit, wherein the inner transfer unit is disposed between the door and the processing module.

### Claim 12 (depends on 8)

The method of claim 8, wherein transferring the wafer carrier from the load lock to the IWCB includes moving the wafer carrier from the load lock to the IWCB using the outer transfer unit.

### Claim 13 (depends on 8)

The method of claim 8, wherein performing the second treatment includes applying a thermal oxidation process, a thermal annealing process, or a combination thereof.

### Claim 14 (depends on 8)

The method of claim 8, wherein loading the wafer carrier includes receiving together multiple semiconductor wafers stored in the wafer carrier, and wherein transferring the semiconductor wafer from the IWCB to the processing module includes transferring each of the multiple semiconductor wafers one at a time.

### Claim 15

A method, comprising:
providing an apparatus for processing semiconductor wafers, wherein the apparatus includes:
a load lock configured to receive a wafer carrier from outside the apparatus, wherein the wafer carrier includes a plurality of semiconductor wafers;
an inner wafer carrier buffer (IWCB) configured to hold the wafer carrier and to perform a gas treatment to the wafer carrier;
a processing module configured to perform a thermal treatment to the semiconductor wafers;
a first transfer unit configured to transfer the wafer carrier from the load lock to the IWCB and from the IWCB to a door disposed between the IWCB and the processing module; and
a second transfer unit configured to transfer semiconductor wafers from the wafer carrier to the processing module through the door;
loading the wafer carrier into the load lock;
sending the wafer carrier from the load lock to the IWCB;
performing the gas treatment to the wafer carrier in the IWCB, thereby treating the semiconductor wafers in the wafer carrier;
moving the treated semiconductor wafers from the IWCB to the processing module; and
performing the thermal treatment to the treated semiconductor wafers in the processing module.

### Claim 16 (depends on 15)

The method of claim 15, wherein sending the wafer carrier from the load lock to the IWCB includes transferring the wafer carrier from the load lock to the IWCB through an opening of the IWCB and connecting a gas inlet and a gas outlet of the IWCB to corresponding ports of the wafer carrier.

### Claim 17 (depends on 15)

The method of claim 15, wherein performing the gas treatment includes purging the wafer carrier with nitrogen.

### Claim 18 (depends on 15)

The method of claim 15, wherein performing the gas treatment to the wafer carrier includes adjusting gas pressure in the IWCB via a pressurization device.

### Claim 19 (depends on 15)

The method of claim 15, wherein performing the thermal treatment includes performing a thermal oxidation process.

### Claim 20 (depends on 15)

The method of claim 15, wherein moving the treated semiconductor wafers includes moving each of the treated semiconductor wafers one at a time into the processing module, and wherein performing the thermal treatment includes performing the thermal treatment to the treated semiconductor wafers simultaneously.