# US 2019/0378733 A1 · Method of manufacturing semiconductor device and cleaning apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0378733 A1 - Document ID: US20190378733A1 - Status: Published application - Kind: A1 - Application number: 16/410,648 - Filed: 2019-05-13 - Published: 2019-12-12 - Earliest claimed: 2018-06-12 - Assignees: Renesas Electronics Corporation - Applicants: Renesas Electronics Corporation - Inventors: Yohei HAMAGUCHI; Shin AOYAMA; Tetsuya TAYAMA - Web page: https://patentgrep.com/patent/US20190378733A1 ## CPC - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H02K 11/27: Devices for sensing current, or actuated thereby (overcurrent protection responsive to temperature of the machines or parts thereof, e.g. windings, H02K11/25) - H10P 70/234: {the processing being the formation of vias or contact holes} - H10P 70/237: {the processing being a planarisation of insulating layers} - H10P 70/273: {the processing being a delineation of conductive layers, e.g. by RIE} - H10P 70/277: {the processing being a planarisation of conductive layers} - H10P 72/0412: {using mainly scrubbing means, e.g. brushes} - H10P 72/0616: {Monitoring of warpages, curvatures, damages, defects or the like} - H10P 74/207: {Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics} - H10P 74/20: characterised by the properties tested or measured, e.g. structural or electrical properties - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53}) ## Abstract The method of manufacturing a semiconductor device according to the embodiment includes a step of performing cleaning. The cleaning step includes a step of preparing a cleaning apparatus having a first rotation mechanism including a first motor, a second rotation mechanism including a second motor, a second central shaft, and a cylindrical roller brush including an outer peripheral surface; a step of rotating the semiconductor wafer around the first central axis by the first rotation mechanism; and a step of rotating the roller brush around the second central axis by the second rotation mechanism and contacting the outer peripheral surface with the surface. An abnormality in the cleaning step is detected based on the current output from the second motor. ## Claims ### Claim 1 A method of manufacturing a semiconductor device, comprising the steps of: preparing a semiconductor wafer having a front surface and a first central axis perpendicular to the front surface, and having an interlayer insulating film formed on the front surface; forming a groove in the interlayer insulating film; embedding a conductive material into the groove; removing a protruding part of the conductive material protruding from the groove by chemical mechanical polishing; and cleaning the semiconductor wafer, wherein in the cleaning the semiconductor wafer includes the steps of: preparing a cleaning apparatus having a roller brush having a first rotation mechanism by a first motor, a second rotation mechanism by a second motor, a second central axis, an outer peripheral surface, rotating the semiconductor wafer around the first central axis by the first rotation mechanism, and rotating the roller brush around the second central axis and contacting the outer peripheral surface with the front surface by the second rotation mechanism, and, an abnormality in the cleaning step is detected based on an electric current from the second motor. ### Claim 2 (depends on 1) A method of manufacturing a semiconductor device according to the claim 1, wherein the abnormality in the cleaning step is abnormality of the second rotation mechanism. ### Claim 3 (depends on 2) A method of manufacturing a semiconductor device according to the claim 2, wherein the abnormality of the second rotation mechanism is detected by comparing a threshold value with a difference value that is a difference of the electric current from the second motor between in a state that the outer peripheral surface is separated from the front surface and in a state that the outer peripheral surface is contacted with the front surface. ### Claim 4 (depends on 3) A method of manufacturing a semiconductor device according to the claim 3, wherein the cleaning apparatus further has a rotation detector which detects rotation speed of the roller brush, and the threshold value is set based on the rotation speed. ### Claim 5 (depends on 4) A method of manufacturing a semiconductor device according to the claim 4, wherein when the rotation speed is 100 revolutions per minute, the second rotation mechanism is normality, in the state that the outer peripheral surface is separated from the front surface, the electric current from the second motor and the second rotation mechanism are normality, in the state that the outer peripheral surface is contacted with the front surface, the threshold value is set 1.5 times or more to 3.0 times or less of the difference value of the electric current from the second motor. ### Claim 6 (depends on 4) A method of manufacturing a semiconductor device according to the claim 4, wherein when the rotation speed is 200 revolutions per minute, the second rotation mechanism is normality, in the state that the outer peripheral surface is separated from the front surface, the electric current from the second motor and the second rotation mechanism are normality, in the state that the outer peripheral surface is contacted with the front surface, the threshold value is set 2.5 times or more to 3.0 times or less of the difference value of the electric current from the second motor. ### Claim 7 (depends on 2) A method of manufacturing a semiconductor device according to the claim 2, wherein the abnormality of the second rotation mechanism is detected by comparing a threshold value with a difference value that is a difference of an average of the electric current from the second motor between in a state that the outer peripheral surface is separated from the front surface and in a state that the outer peripheral surface is contacted with the front surface. ### Claim 8 (depends on 2) A method of manufacturing a semiconductor device according to the claim 2, wherein the abnormality of the second rotation mechanism is detected by comparing a threshold value with a difference value that is a difference of a maximum of the electric current from the second motor between in a state that the outer peripheral surface is separated from the front surface and in a state that the outer peripheral surface is contacted with the front surface. ### Claim 9 (depends on 2) A method of manufacturing a semiconductor device according to the claim 2, wherein the abnormality of the second rotation mechanism is detected by comparing a threshold value with a difference value that is a difference of a Fourier transform value of the electric current from the second motor between in a state that the outer peripheral surface is separated from the front surface and in a state that the outer peripheral surface is contacted with the front surface. ### Claim 10 (depends on 2) A method of manufacturing a semiconductor device according to the claim 2, wherein the conductive material includes copper, and the removing step and the cleaning step are performed in a state of light shielding from the circumferences. ### Claim 11 A method of manufacturing a semiconductor device, comprising the steps of: preparing a semiconductor wafer having a front surface, a back surface opposite to the front surface, and a first central axis perpendicular to the front surface and the back surface, and having an interlayer insulating film formed on the front surface; forming a conductive material on the interlayer insulating film, after forming the conductive material, cleaning the semiconductor wafer; and after cleaning the semiconductor wafer, forming a photoresist, wherein, the cleaning step including the steps of: preparing a cleaning apparatus having a pen-type brush having a first rotation mechanism by a first motor, a second rotation mechanism by a second motor, a second central axis, and an end face perpendicular to the second central axis rotating the semiconductor wafer around the first central axis by the first rotation mechanism, and rotating the pen-type brush around the second central axis and contacting the end face with the front surface by the second rotation mechanism, and, an abnormality in the cleaning step is detected based on an electric current from the second motor. ### Claim 12 A cleaning apparatus, comprising: a first rotation mechanism having a first motor and rotating the semiconductor wafer around the first central axis perpendicular to the front surface; a roller brush having a second central axis and an outer peripheral surface and configured so as to be capable of the outer peripheral surface contacting with and separating from the front surface; a second rotation mechanism having a second motor and rotating the roller brush around the second central axis; and an abnormality detector detecting abnormality of the second rotation mechanism based on an electric current from the second motor, wherein the abnormality detector is configured so as to be detect the abnormality of the second rotation mechanism by comparing a threshold value with a difference value that is a difference of the electric current from the second motor between in a state that the outer peripheral surface is separated from the front surface and in a state that the outer peripheral surface is contacted with the front surface. ### Claim 13 A cleaning apparatus, comprising: a first rotation mechanism having a first motor and rotating the semiconductor wafer around the first central axis perpendicular to the front surface; a pen-type brush having a second central axis and an end face perpendicular to the second central axis and configured so as to be capable of the end face contacting with and separating from the front surface; a second rotation mechanism having a second motor and rotating the pen-type brush around the second central axis; and an abnormality detector detecting abnormality of the second rotation mechanism based on an electric current from the second motor, wherein the abnormality detector is configured so as to be detect the abnormality of the second rotation mechanism by comparing a threshold value with a difference value that is a difference of the electric current from the second motor between in a state that the end face is separated from the front surface and in a state that the end face is contacted with the front surface.