# US 2019/0378732 A1 · Treatment apparatus for treating workpiece

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- Number: US 2019/0378732 A1
- Document ID: US20190378732A1
- Status: Published application
- Kind: A1
- Application number: 16/430,709
- Filed: 2019-06-04
- Published: 2019-12-12
- Earliest claimed: 2018-06-12
- Assignees: Disco Corporation
- Applicants: Disco Corporation
- Inventors: Satoshi HANAJIMA
- Web page: https://patentgrep.com/patent/US20190378732A1

## CPC

- H10P 72/0414: {using mainly spraying means, e.g. nozzles}
- H10P 72/0468: {comprising a chamber adapted to a particular process}
- B28D 5/0094: {the supporting or holding device being of the vacuum type}
- H10P 72/0411: {for wet cleaning or washing}
- H10P 72/0421: {for drying etching}
- H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting}
- H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring}
- H10P 72/7608: {characterised by a plurality of separate clamping members, e.g. clamping fingers}
- H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B28D: WORKING STONE OR STONE-LIKE MATERIALS

## Abstract

A treatment apparatus including a chuck table, a table base, a servo motor that rotates the table base, and a determination unit that determines the kind of the chuck table mounted to the table base is provided. The determination unit includes a torque recording section in which a torque outputted by the servo motor when rotating the table base is recorded on the basis of the kind of the chuck table, and a determination section that collates the torque outputted by the servo motor with the torque recording section, to thereby determine the kind of the chuck table.

## Claims

### Claim 1

A treatment apparatus comprising:
a chuck table that has a holding surface mounting a workpiece thereon and holds the workpiece;
a table base to which the chuck table is detachably fixed;
a servo motor that rotates the table base around a rotational axis along a direction perpendicular to the holding surface of the chuck table mounted to the table base;
a treatment unit that treats the workpiece held by the chuck table; and
a determination unit that determines the kind of the chuck table mounted to the table base,
wherein the determination unit includes
a torque recording section in which a torque outputted by the servo motor when rotating the table base is recorded on a basis of the kind of the chuck table mounted to the table base,
a determination section that measures a torque outputted by the servo motor when rotating the table base with the chuck table mounted thereto, and collates the measured torque with each of the torques recorded in the torque recording section, to thereby determine the kind of the chuck table, and
a reporting section that reports a result of determination carried out by the determination section.

### Claim 2 (depends on 1)

The treatment apparatus according to claim 1,
wherein the torque measured by the determination section is one of or both a torque during acceleration until the table base reaches a predetermined rotational speed and a torque during deceleration until the table base is stopped from the predetermined rotational speed.

### Claim 3 (depends on 1)

The treatment apparatus according to claim 1,
wherein the treatment unit is a cleaning unit cleaning the workpiece.