# US 2019/0378677 A1 · Beam bender

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- Number: US 2019/0378677 A1
- Document ID: US20190378677A1
- Status: Published application
- Kind: A1
- Application number: 16/435,744
- Filed: 2019-06-10
- Published: 2019-12-12
- Earliest claimed: 2018-06-11
- Assignees: Ebara Corporation
- Applicants: Ebara Corporation
- Inventors: Takeshi Murakami
- Web page: https://patentgrep.com/patent/US20190378677A1

## CPC

- H01J 37/05: Electron or ion-optical arrangements for separating electrons or ions according to their energy {or mass}(particle separator tubes H01J49/00)
- G01R 31/305: using electron beams {(investigating or analysing materials by measuring photoelectric effect G01N23/227)}
- H01J 37/10: Lenses
- H01J 37/147: Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10)
- H01J 37/244: Detectors; Associated components or circuits therefor
- H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)}
- H01J 2237/053: electrostatic
- H01J 2237/057: Energy or mass filtering
- H01J 2237/0635: Multiple source, e.g. comb or array
- H01J 2237/1508: Combined electrostatic-electromagnetic means
- H01J 2237/28: Scanning microscopes
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

In a first cross section along an electron ray that passes between an inner curved surface and an outer curved surface of a beam bender, the curvature of the surfaces are fixed, and the center of the curvature of the surfaces are set so as to match each other. In a second cross section perpendicular to the electron ray, the curvature of the surfaces are fixed, and the center of curvature of the surfaces are set so as to match each other. The radius of the curvature of the surface in the second cross section is set to be larger than that of the surface in the first cross section. The radius of curvature of the surface in the second cross section is set to be larger than that of the surface in the first cross section.

## Claims

### Claim 1

A beam bender, comprising:
an inner electrode having an inner curved surface; and
an outer electrode having an outer curved surface,
wherein different electrical potentials are applied to each of the inner electrode and the outer electrode to generate an electric field which bends an electron ray that passes between the inner curved surface and the outer curved surface,
a curvature of the inner curved surface and a curvature of the outer curved surface are set to be fixed, and a center of curvature of the inner curved surface and a center of curvature of the outer curved surface are set to match each other in a first cross section along a direction of travel of the electron ray that passes between the inner curved surface and the outer curved surface,
the curvature of the inner curved surface and the curvature of the outer curved surface are set to be fixed, and the center of curvature of the inner curved surface and the center of curvature of the outer curved surface are set to match each other in a second cross section perpendicular to the direction of travel of the electron ray,
a radius of the curvature of the inner curved surface in the second cross section is set to be larger than a radius of the curvature of the inner curved surface in the first cross section, and
a radius of the curvature of the outer curved surface in the second cross section is set to be larger than a radius of the curvature of the outer curved surface in the first cross section.

### Claim 2 (depends on 1)

The beam bender according to claim 1, wherein, in the second cross section, a normal vector of the inner curved surface passing through a center position of the inner curved surface and a normal vector of the outer curved surface passing through a center position of the outer curved surface match each other, a position through which the electron ray passes is set on the normal vectors, a curved surface shape of the inner curved surface has a symmetrical shape about the normal vectors, and a curved surface shape of the outer curved surface has a symmetrical shape about the normal vectors.

### Claim 3 (depends on 1)

The beam bender according to claim 1, wherein the radius of the curvature of the inner curved surface and the radius of the curvature of the outer curved surface in the second cross section are set so that a misalignment of a position at which parallelly entering electron rays separated from a central trajectory of the electron rays that enter a place between the inner curved surface and the outer curved surface by a predetermined distance intersects with the central trajectory after passing between the inner curved surface and the outer curved surface in the first cross section becomes small.

### Claim 4 (depends on 1)

The beam bender according to claim 1, wherein:
the radius of the curvature of the inner curved surface in the second cross section is set to be more than one time of the radius of curvature of the inner curved surface in the first cross section and three times or less of the radius of curvature of the inner curved surface in the first cross section; and
the radius of the curvature of the outer curved surface in the second cross section is set to be more than one time of the radius of curvature of the outer curved surface in the first cross section and three times or less of the radius of curvature of the outer curved surface in the first cross section.