# US 2019/0377331 A1 · High volume autonomous material handling system to improve ic factory throughput and cycle time

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- Number: US 2019/0377331 A1
- Document ID: US20190377331A1
- Status: Published application
- Kind: A1
- Application number: 16/436,565
- Filed: 2019-06-10
- Published: 2019-12-12
- Earliest claimed: 2018-06-11
- Assignees: Middlesex Industries S.A.
- Applicants: Middlesex Industries, SA.
- Inventors: George W. Horn
- Web page: https://patentgrep.com/patent/US20190377331A1

## CPC

- G05B 19/4189: {characterised by the transport system}
- B65G 37/02: Flow-sheets for conveyor combinations in warehouses, magazines or workshops
- B65G 43/10: Sequence control of conveyors operating in combination
- B65G 47/90: Devices for picking-up and depositing articles or materials
- H10P 72/0612: {Production flow monitoring, e.g. for increasing throughput}
- H10P 72/3216: {using a general scheme of a conveying path within a factory}
- B65G 2207/14: Combination of conveyors
- G05B 2219/31272: Avoid piling up, queue of workpieces, accommodate surges
- Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)
- B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

Asynchronous conveyor networks serving as inter-process transport mechanisms eliminate transport capacity constraints of vehicle-based systems in integrated circuit (IC) manufacturing environments. Demand variability may be buffered without the use of off-line-storage such as stockers. The variability in wait times for transport service is also eliminated. Overall factory cycle times are thus reduced while manufacturing capacity is simultaneously increased. An autonomous conveyor network automated materials handling system combines clean frictionless conveyor principles with a unique network layout to fulfill the logistics requirements of IC manufacturing environments. Mechanical conveyor-to-tool interfaces, also referred to as equipment delivery interfaces (EDi's), bridge the conveyor network to individual tools. An operating software module integrates the functionality of the conveyor network and EDi's. The result is a full capability factory logistics system.

## Claims

### Claim 1

An asynchronous logistics system for moving and processing work in process (WIP) within a manufacturing environment comprising plural tool bays, each comprising at least one manufacturing tool for processing WIP, the system comprising:
an inter-process transportation system for selectively moving the WIP between manufacturing tools, the transportation system being comprised of sequential conveyor segments, each conveyor segment having a respective drive unit for selectively moving WIP on the conveyor segment and a respective controller configured for autonomously and selectively moving WIP at least on the basis of an input from a next successive conveyor segment indicative of the presence or absence of WIP thereon;
plural tool interfaces, each adjacent a respective conveyor segment of the transportation system and having a respective controller for autonomously and selectively moving WIP between the adjacent conveyor segment and a respective manufacturing tool; and
a localized movement coordination system comprised of plural control zones, each control zone comprised of plural sequential conveyor segments and tool interfaces and a respective control zone processor in communication with each of the respective conveyor segment and tool interface controllers, the control zone processor having, for each WIP within the respective control zone, a unique identifier of the WIP and data characteristic of the required movement and processing of the WIP, the control zone processor for selectively controlling the operation of ones of the respective conveyor segments and tool interfaces, thereby influencing the autonomous movement and processing of the WIP within the control zone; and
an environment-wide, regionalized movement coordination system comprised of plural regions, each region comprised of plural control zones and a respective dispatch controller in communication with each respective control zone processor and with all other region dispatch controllers of the regionalized movement coordination system for enabling environment-wide coordination of WIP movement and processing.

### Claim 2 (depends on 1)

The system of claim 1, wherein each control zone has at least one conveyor segment adjacent a conveyor segment of another control zone for selectively exchanging WIP therebetween.

### Claim 3 (depends on 2)

The system of claim 2, wherein when a WIP is exchanged from a conveyor segment of a first control zone to a conveyor segment of a second control zone, the control zone processor of the first control zone communicates to the control zone processor of the second control zone the respective WIP unique identifier and the data characteristic of the required movement and processing of the WIP.

### Claim 4 (depends on 1)

The system of claim 1, wherein the transportation system comprises a plurality of intra-bay conveyor loops, each intra-bay conveyor loop comprised of plural sequential conveyor segments configured to autonomously, selectively move the WIP in one direction about the respective loop.

### Claim 5 (depends on 4)

The system of claim 4, wherein each intra-bay conveyor loop further comprises at least one of the plural tool interfaces.

### Claim 6 (depends on 5)

The system of claim 5, wherein the at least one manufacturing tool of each tool bay comprises a tool port adjacent a respective tool interface.

### Claim 7 (depends on 6)

The system of claim 6, wherein each tool interface is configured to autonomously and selectively relocate a WIP between a respective intra-bay conveyor loop and a tool port.

### Claim 8 (depends on 6)

The system of claim 6, wherein the at least one tool interface comprises:
a lateral buffer conveyor for receiving a WIP from the respective intra-bay conveyor loop and for selectively moving the WIP proximate the at least one manufacturing tool;
a beam extending above and orthogonal to the lateral buffer conveyor;
a trolley for selectively traveling on the beam; and
a gripper suspended from the trolley by plural length-adjustable cables,
wherein, when the trolley is disposed on the beam above the WIP on the lateral buffer conveyor, the gripper is configured to be lowered by extension of the cables into engagement with the WIP and to mechanically engage the WIP,
wherein, when the gripper has mechanically engaged the WIP, the gripper is configured to lift the WIP by retraction of the cables and the trolley is configured to travel on the beam whereby the WIP is above a tool port, and
wherein, when the WIP is above the tool port, the gripper is configured to be lowered by extension of the cables, thereby lowering the WIP to the tool port.

### Claim 9 (depends on 6)

The system of claim 6, wherein the at least one tool interface comprises:
a lateral buffer conveyor for receiving a WIP from the at least one manufacturing tool;
a beam extending above and orthogonal to the lateral buffer conveyor;
a trolley for selectively traveling on the beam; and
a gripper suspended from the trolley by plural length-adjustable cables,
wherein, when the trolley is disposed on the beam above the WIP at the tool port, the gripper is configured to be lowered by extension of the cables into engagement with the WIP and to mechanically engage the WIP,
wherein, when the gripper has mechanically engaged the WIP, the gripper is configured to lift the WIP by retraction of the cables and the trolley is configured to travel on the beam whereby the WIP is above the buffer conveyor, and
wherein, when the WIP is above the buffer conveyor, the gripper is configured to be lowered by extension of the cables, thereby lowering the WIP to the buffer conveyor.

### Claim 10 (depends on 4)

The system of claim 4, wherein each intra-bay conveyor loop is proximate to but not coincident with at least one other intra-bay conveyor loop, each of the adjacent intra-bay conveyor loops configured to selectively move WIP in the same direction about the respective loop.

### Claim 11 (depends on 10)

The system of claim 10, further comprising at least one conveyor shunt between two adjacent intra-bay conveyor loops, each shunt comprised of two first conveyor segments, each coincident with a respective one of the two adjacent intra-bay conveyor loops, the first conveyor segments configured to selectively move a WIP either onto the next consecutive conveyor segment within the respective intra-bay conveyor loop or to selectively exchange a WIP between the respective intra-bay conveyor loop and the shunt.

### Claim 12 (depends on 11)

The system of claim 11, wherein each shunt further comprises at least one second conveyor segment between the two first conveyor segments and configured to selectively move a WIP to a next consecutive conveyor segment within the shunt.

### Claim 13 (depends on 4)

The system of claim 4, further comprising at least one inter-bay conveyor loop surrounding and partially coincident with plural intra-bay conveyor loops, the at least one inter-bay conveyor loop configured to selectively move a WIP between intra-bay conveyor loops under control of a respective control zone processor.

### Claim 14 (depends on 13)

The system of claim 13, wherein each inter-bay conveyor loop is configured to move WIP in the same direction as the intra-bay conveyor loops with which it is coincident.

### Claim 15 (depends on 1)

The system of claim 1, wherein the controller of a first conveyor segment is in communication with the controller of a second, consecutive conveyor segment for receiving second conveyor segment status data indicative of the presence or absence of a WIP on the second conveyor segment, the controller of the first conveyor segment operative to autonomously and selectively move a WIP on the first conveyor segment in response to the second conveyor segment status data, whereby the WIP may be selectively moved to the second conveyor segment without risk of collision with another WIP on the second conveyor segment.

### Claim 16 (depends on 1)

The system of claim 1, wherein a respective one of the control zone processors is in communication with the controller of each of the plural conveyor segments within the respective control zone to selectively receive status information therefrom and to selectively provide instructions thereto.

### Claim 17 (depends on 16)

The system of claim 16, wherein a first conveyor segment controller is configured to autonomously move a WIP to a second, consecutive conveyor segment upon receipt, from a second conveyor segment controller, of data indicative of the absence of a WIP on the second, consecutive conveyor segment and in the absence of a command from the respective control zone processor instructing the first conveyor segment controller to not move the WIP to the second, consecutive conveyor segment.

### Claim 18

A method of selectively moving and processing work in process (WIP) within a manufacturing environment comprising plural tool bays, each comprising at least one manufacturing tool for processing the WIP, the method comprising:
providing an asynchronous logistics system for moving and processing WIP within the manufacturing environment, the logistics system comprising
an inter-process transportation system for selectively moving the WIP, the transportation system being comprised of sequential conveyor segments, each conveyor segment having a respective drive unit for selectively moving WIP on the conveyor segment and a respective controller configured for autonomously and selectively moving WIP at least on the basis of an input from a next successive conveyor segment indicative of the presence or absence of a WIP thereon,
plural tool interfaces, each adjacent a respective conveyor segment of the transportation system and having a respective controller for autonomously and selectively moving WIP between the adjacent conveyor segment and a respective manufacturing tool,
a localized movement coordination system comprised of plural control zones, each control zone comprised of plural sequential conveyor segments and tool interfaces and a respective control zone processor in communication with each of the respective conveyor segment and tool interface controllers, the control zone having, for each WIP within the respective control zone, a unique identifier of the WIP and data characteristic of the required movement and processing of the WIP, the control zone processor for selectively controlling the operation of ones of the respective conveyor segments and tool interfaces, thereby influencing the autonomous movement and processing of the WIP within the respective control zone, and
an environment-wide, regionalized movement coordination system comprised of plural regions, each region comprised of plural control zones and a respective dispatch controller in communication with each control zone processor and with all other region dispatch controllers of the regionalized movement coordination system for enabling environment-wide coordination of WIP movement and processing;
receiving a first WIP on the logistics system; and
autonomously and selectively moving the WIP from a first conveyor segment to a second, consecutive conveyor segment by selective actuation of the drive unit of the first conveyor segment by the respective controller at least in part in response to data from the second conveyor segment indicative of the presence or absence of a WIP on the second, consecutive conveyor segment.

### Claim 19 (depends on 18)

The method of claim 18, wherein
the transportation system further comprises a plurality of intra-bay conveyor loops, each intra-bay conveyor loop logically assigned to a respective control zone and comprised of
plural sequential conveyor segments configured to autonomously, selectively move WIP in one direction about the respective loop,
at least one of the plural tool interfaces, and
a tool port of at least one manufacturing tool adjacent the at least one tool interface,
the method further comprising:
receiving a WIP by one of the at least one tool interfaces from a conveyor segment of the respective intra-bay conveyor loop; and
depositing the WIP by the tool interface at the tool port under control of the respective control zone processor.

### Claim 20 (depends on 19)

The method of claim 19, wherein
each intra-bay conveyor loop is proximate to but not coincident with at least one other intra-bay conveyor loop logically assigned to the same control zone, each of the adjacent intra-bay conveyor loops configured to selectively convey WIP in the same direction about the respective loop,
the transportation system further comprises
at least one conveyor shunt between two adjacent intra-bay conveyor loops, and
at least one inter-bay conveyor loop surrounding and partially coincident with the plurality of intra-bay conveyor loops, the at least one inter-bay conveyor loop configured to selectively convey a WIP between intra-bay conveyor loops,
the method further comprises controlling select ones of the conveyor segments comprising at least one of the adjacent intra-bay conveyor loops and the at least one inter-bay conveyor loop, by the respective control zone processor, to convey the WIP to one of a conveyor segment adjacent one of the at least one tool interface, one of the at least one conveyor shunts, or a conveyor segment of the at least one inter-bay conveyor loop.

### Claim 21 (depends on 20)

The method of claim 20 further comprising communicating, by the respective control zone processor, with the local controller of each of the plural conveyor segments to receive status information therefrom and to selectively provide instructions thereto.

### Claim 22 (depends on 21)

The method of claim 21, further comprising determining by a control zone processor, for each WIP within an intra-bay conveyor loop and requiring processing by a manufacturing tool within the intra-bay conveyor loop, a relative priority thereof and selectively controlling at least one of a conveyor shunt, the intra-bay conveyor loop, the inter-bay conveyor loop coincident with the intra-bay conveyor loop, and a tool interface while at the same time individual conveyor segments within the respective control zone autonomously move WIP to subsequent conveyor segments without input from the respective control zone processor.

### Claim 23 (depends on 18)

The method of claim 18 further comprising selectively, autonomously moving the WIP from a first conveyor segment to a second, consecutive conveyor segment by selective actuation of the drive unit of the first conveyor segment by the respective controller at least in part in response to the absence of a command from the respective control zone processor instructing the first conveyor segment controller to not move the WIP to the second conveyor segment.

### Claim 24 (depends on 18)

The method of claim 18, further comprising autonomously moving a WIP from a first conveyor segment, logically assigned to a first control zone, by the first conveyor segment processor controlling the respective conveyor segment drive unit, to a second conveyor segment, logically assigned to a second control zone, and automatically transferring WIP identifying data and data characteristic of the required movement and processing of the respective WIP from the processor of the first control zone to the processor of the second control zone.

### Claim 25 (depends on 18)

The method of claim 18, further comprising receiving an indication at a tool interface controller that a processed WIP has been output at a respective tool port and autonomously moving the processed WIP from the tool port to one of a lateral buffer conveyor associated with the tool interface and a conveyor segment within the respective control zone.

### Claim 26 (depends on 25)

The method of claim 25, wherein
the tool interface comprises
the lateral buffer conveyor,
a beam extending above and orthogonal to the lateral buffer conveyor;
a trolley for selectively traveling on the beam; and
a gripper suspended from the trolley by plural length-adjustable cables,
the method further comprising, when the trolley is disposed on the beam above the WIP at the respective tool port, lowering the gripper by extension of the cables into engagement with the WIP and mechanically engaging the WIP,
lifting the WIP by retraction of the cables,
moving the trolley on the beam until the WIP is above the lateral buffer conveyor,
lowering the gripper by extension of the cables, thereby lowering the WIP to the lateral buffer conveyor.

### Claim 27 (depends on 18)

The method of claim 18, further comprising receiving an indication at a tool interface controller that a WIP is on the lateral buffer conveyor and requires movement to a respective tool port and autonomously moving the WIP from the buffer conveyor to the tool port.

### Claim 28 (depends on 27)

The method of claim 27, wherein
the tool interface comprises
the lateral buffer conveyor,
a beam extending above and orthogonal to the lateral buffer conveyor;
a trolley for selectively traveling on the beam; and
a gripper suspended from the trolley by plural length-adjustable cables,
the method further comprising, when the trolley is disposed on the beam above the WIP on the buffer conveyor, lowering the gripper by extension of the cables into engagement with the WIP and mechanically engaging the WIP,
lifting the WIP by retraction of the cables,
moving the trolley on the beam until the WIP is above the tool port, and
lowering the gripper by extension of the cables, thereby lowering the WIP to the tool port.