# US 2019/0376938 A1 · Vacuum Ultraviolet Absorption Spectroscopy System And Method

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- Number: US 2019/0376938 A1
- Document ID: US20190376938A1
- Status: Published application
- Kind: A1
- Application number: 16/005,843
- Filed: 2018-06-12
- Published: 2019-12-12
- Earliest claimed: 2018-06-12
- Assignees: VUV Analytics, Inc.
- Applicants: VUV Analytics, Inc.
- Inventors: Dale A. Harrison; Anthony T. Hayes
- Web page: https://patentgrep.com/patent/US20190376938A1

## CPC

- G01N 30/78: using more than one detector
- G01J 3/02: Details
- G01N 21/05: Flow-through cuvettes (G01N21/09 takes precedence; handling fluid samples G01N1/10)
- G01N 21/15: Preventing contamination of the components of the optical system or obstruction of the light path
- G01N 21/33: using ultraviolet light (G01N21/39 takes precedence)
- G01N 30/74: Optical detectors {(measurement of intensity, velocity, spectral content, polarisation, or phase of infrared, visible or ultraviolet light G01J)}
- G01N 33/0027: {concerning the detector}
- G01N 21/0332: {with temperature control (control of temperature G05D23/00; cryostats F17C3/08)}
- G01N 21/09: adapted to resist hostile environments or corrosive or abrasive materials
- G01N 2021/0325: {Cells for testing reactions, e.g. containing reagents}
- G01N 2021/335: {Vacuum UV}
- G01N 2030/025: {Gas chromatography}
- G01N 2030/027: {Liquid chromatography}
- G01N 2201/024: Modular construction
- G01N 2201/0633: Directed, collimated illumination
- G01N 2201/12: Circuits of general importance; Signal processing
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

In one embodiment, an improved gas analysis system having a gas flow cell is provided. In another embodiment an improved gas flow cell is provided. As disclosed herein, dead volumes in a gas flow channel of a gas flow cell may be minimized through the use of one or more additional gas inlets. In one embodiment, an additional gas inlet is located between an analyte gas inlet and a light entrance optical coupling of the gas flow cell. In another embodiment, an additional gas inlet is located between an analyte gas outlet and a light exit optical coupling of the gas flow cell. In addition, enclosed regions may be formed adjacent seals of the gas flow channel of the gas flow cell. The enclosed regions may be evacuated and/or purged so as to minimize the passage of contaminants through the seals into the gas flow channel.

## Claims

### Claim 1

A gas analysis system configured to analyze an analyte gas, the gas analysis system comprising:
a gas flow cell, the gas flow cell optically coupled to an optical detection system and a light source, the gas analysis system configured to provide collimated light to the gas flow cell, the gas flow cell comprising:
a gas inlet;
a gas outlet;
a gas flow channel, the gas flow channel being environmentally sealed to provide a controlled environment for a flow of the analyte gas from the gas inlet to the gas outlet;
at least one make-up gas inlet, the make-up gas inlet configured to provide a make-up gas flow of a make-up gas to sweep at least one dead-volume region, the make-up gas being different from the analyte gas; and
a plurality of optical couplings through which VUV wavelengths or less of light may pass as part of transmission of the light through the gas flow channel.

### Claim 2 (depends on 1)

The system of claim 1, wherein the at least one dead volume region is proximate to at least one of the plurality of optical couplings.

### Claim 3 (depends on 1)

The system of claim 1, wherein the at least one dead volume region is located between the gas inlet and a first optical coupling, the first optical coupling coupled to the light source so that light enters the gas flow cell through the first optical coupling.

### Claim 4 (depends on 1)

The system of claim 1, wherein the at least one dead volume region is located between the gas outlet and a second optical coupling, the second optical coupling allowing light to exit the gas flow cell.

### Claim 5 (depends on 1)

The system of claim 1, wherein at least two make-up gas inlets are provided, each of the at least two make-up gas inlets providing make-up gas flow to sweep at least one dead-volume region.

### Claim 6 (depends on 5)

The system of claim 5, wherein a first of the at least two make-up gas inlets provides a first make-up gas flow to sweep at least a first dead-volume region proximate to a first optical coupling, and the second of at least two make-up gas inlets provides a second make-up gas flow to sweep at least a second dead-volume region proximate to a second optical coupling.

### Claim 7 (depends on 6)

The system of claim 6, wherein a third make-up gas inlet is provided, the third make-up gas inlet providing make-up gas flow to sweep at least one dead volume proximate to either the gas inlet or gas outlet.

### Claim 8 (depends on 1)

The system of claim 1, further comprising
an enclosed region external to the gas flow channel,
at least one seal, the at least one seal being between the gas flow channel and enclosed region;
at least one secondary gas inlet and at least one secondary gas outlet, the secondary gas inlet providing a secondary gas to the enclosed region and the secondary gas outlet removing the secondary gas from the enclosed region, the secondary gas maintaining an enclosed region controlled environment within the enclosed region in order to decrease the diffusion of contaminants through the at least one seal into the gas flow channel.

### Claim 9 (depends on 8)

The system of claim 8, wherein the at least one dead volume region is proximate to at least one of the plurality of optical couplings.

### Claim 10 (depends on 8)

The system of claim 8, wherein the at least one dead volume region is located between the gas inlet and a first optical coupling, the first optical coupling coupled to the light source so that light enters the gas flow cell through the first optical coupling.

### Claim 11 (depends on 8)

The system of claim 8, wherein the at least one dead volume region is located between the gas outlet and a second optical coupling, the second optical coupling allowing light to exit the gas flow cell.

### Claim 12 (depends on 11)

The system of claim 11, wherein at least two make-up gas inlets are provided, each of the at least two make-up gas inlets providing make-up gas flow to sweep at least one dead-volume region.

### Claim 13 (depends on 12)

The system of claim 12, wherein a first of the at least two make-up gas inlets provides a first make-up gas flow to sweep at least a first dead-volume region proximate to a first optical coupling, and the second of at least two make-up gas inlets provides a second make-up gas flow to sweep at least a second dead-volume region proximate to a second optical coupling.

### Claim 14

A gas flow cell, the gas flow cell comprising:
a gas inlet;
a gas outlet;
a gas flow channel, the gas flow cell being environmentally sealed to provide a controlled environment for a flow of a first gas from the gas inlet to the gas outlet through the gas flow channel;
at least a first make-up gas inlet, the first make-up gas inlet configured to provide a first make-up gas flow of a make-up gas to sweep at least a first dead-volume region, the make-up gas being different from the first gas;
a plurality of optical couplings through which VUV wavelengths or less of light may pass as part of transmission of the light through the gas flow channel;
a first enclosed region external to the gas flow channel;
at least a first seal, the first seal being between the gas flow channel and the first enclosed region; and
at least a first secondary gas inlet and at least a first secondary gas outlet, the first secondary gas inlet and the first secondary gas outlet allowing for a first secondary gas to enter and exit the enclosed region to control the environment within the enclosed region in order to decrease the diffusion of contaminants through the first seal into the gas flow channel.

### Claim 15 (depends on 14)

The gas flow cell of claim 14, further comprising:
at least a second make-up gas inlet, the second make-up gas inlet configured to provide a second make-up gas flow of the make-up gas to sweep at least a second dead-volume region.

### Claim 16 (depends on 15)

The gas flow cell of claim 15, further comprising:
a second enclosed region external to the gas flow channel;
at least a second seal, the second seal being between the gas flow channel and the first enclosed region; and
at least a second secondary gas inlet and at least a second secondary gas outlet, the second secondary gas inlet and second secondary gas outlet allowing for a second secondary gas to enter and exit the second enclosed region to control the environment within the second enclosed region in order to decrease the diffusion of contaminants through the second seal into the gas flow channel, wherein the first secondary gas and the second secondary gas may be the same or different gas.

### Claim 17 (depends on 16)

The gas flow cell of claim 16, wherein the first dead volume region is located between the gas inlet and a first optical coupling of the plurality of optical couplings, the first optical coupling being an entrance optical coupling so that light enters the gas flow cell through the first optical coupling.

### Claim 18 (depends on 17)

The gas flow cell of claim 17, wherein the second dead volume region is located between the gas outlet and a second optical coupling of the plurality of optical couplings, the second optical coupling allowing light to exit the gas flow cell.

### Claim 19 (depends on 18)

The gas flow cell of claim 18, wherein the first and second seals contact the first optical coupling and second optical coupling respectively.

### Claim 20 (depends on 15)

The gas flow cell of claim 15, further comprising:
a second enclosed region external to the gas flow channel;
at least a second seal, the second seal being between the gas flow channel and the first enclosed region; and
at least a second secondary gas inlet and at least a second secondary gas outlet, the second secondary gas inlet and second secondary gas outlet allowing for a second secondary gas to enter and exit the second enclosed region to control the environment within the second enclosed region in order to decrease the diffusion of contaminants through the second seal into the gas flow channel, wherein the first secondary gas and the second secondary gas may be the same or different gas.