# US 2019/0376789 A1 · Sensor element, angular velocity sensor, and multi-axis angular velocity sensor

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- Number: US 2019/0376789 A1
- Document ID: US20190376789A1
- Status: Published application
- Kind: A1
- Application number: 16/479,442
- Filed: 2018-01-22
- Published: 2019-12-12
- Earliest claimed: 2017-01-24
- Assignees: KYOCERA Corporation
- Applicants: KYOCERA Corporation
- Inventors: Munetaka SOEJIMA
- Web page: https://patentgrep.com/patent/US20190376789A1

## CPC

- G01C 19/5607: using vibrating tuning forks (double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719)
- G01C 19/5621: the devices involving a micromechanical structure
- B81B 3/00: Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B5/00 takes precedence)
- B81B 3/0018: {Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators}
- H10N 30/03: Assembling devices that include piezoelectric or electrostrictive parts
- H10N 30/302: {Sensors}
- B81B 2201/02: Sensors
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

A sensor element includes a piezoelectric body, a plurality of excitation electrodes, and a plurality of detecting electrodes. The piezoelectric body includes a frame and a driving arm and detecting arm which extend from the frame within a predetermined plane parallel to an xy plane in an orthogonal coordinate system xyz. The plurality of excitation electrodes are located on the driving arm. The plurality of detecting electrodes are located on the detecting arm in an arrangement enabling detection of a signal generated by bending deformation of the detecting arm in a z-axis direction. The detecting arm includes a first arm and second arm. The first arm extends from the frame in the predetermined plane. The second arm is connected to a front end side portion of the first arm and extend from a front end side of the first arm toward a frame side within the predetermined plane. An end part of the second arm on the frame side is formed as a free end.

## Claims

### Claim 1

A sensor element, comprising:
a piezoelectric body which comprises
a base part and
a driving arm and a detecting arm which extend from the base part within a predetermined plane parallel to an xy plane in an orthogonal coordinate system xyz,
a plurality of excitation electrodes located on the driving arms,
a plurality of detecting electrodes which are located on the detecting arm in an arrangement enabling detection of a signal generated due to bending deformation of the detecting arm in the z-axis direction,
wherein the detecting arm comprises
a first arm extending from the base part within the predetermined plane and
a second arm which is connected to a front end side portion of the first arm, extends from a front end side of the first arm toward a base part side within the predetermined plane, and comprises an end part on the base part side as a free end.

### Claim 2 (depends on 1)

The sensor element according to claim 1, wherein at least part of the plurality of detecting electrodes are located on the second arm.

### Claim 3 (depends on 2)

The sensor element according to claim 2, wherein
the plurality of detecting electrodes comprises
a plurality of first electrodes located on the first arm and
a plurality of second electrodes located on the second arm, and,
among the plurality of first electrodes and the plurality of second electrodes, electrodes generating potentials having the same polarities as each other when the first arm and the second arms bend to inverse sides from each other in the z-axis direction are connected to each other.

### Claim 4 (depends on 1)

The sensor element according to claim 1, wherein the detecting arm comprises
the first arm and
a pair of the second arms located on lateral two sides of the first arm.

### Claim 5 (depends on 1)

The sensor element according to claim 1, wherein the detecting arm comprises
a pair of the first arms extending alongside each other and
the second arm located between the two first arms.

### Claim 6 (depends on 1)

The sensor element according to claim 1, wherein:
the base part comprises a long shape so that its two ends are separated from each other in the x-axis direction,
the piezoelectric body comprises a pair of the driving arms which extend from the base part alongside each other in the y-axis direction at positions where they are separated from each other in the x-axis direction,
the first arm extends from the base part in the y-axis direction at a position between the pair of driving arms in the x-axis direction,
the plurality of excitation electrodes are in an arrangement able to supply voltages exciting the pair of driving arms in the x-axis direction, and
the sensor element further comprises
a plurality of pads which are located in the piezoelectric body so as to be capable of supporting portions in the base part which are closer to two sides of the x-axis direction than the pair of driving arms, and
a plurality of wirings connecting the plurality of excitation electrodes in connection relationships where voltages having inverse phases from each other making the pair of driving arms vibrate to inverse sides from each other in the x-axis direction are supplied from the plurality of excitation electrodes to the pair of driving arms.

### Claim 7 (depends on 6)

The sensor element according to claim 6, wherein the detecting arm is located at a center between the pair of driving arms.

### Claim 8 (depends on 6)

The sensor element according to claim 6, wherein the piezoelectric body, as arms which extend from the base part and vibrate by application of voltage, comprises
only the one pair of driving arms, or
only the one pair of driving arms and one or more arms which extend alongside the pair of driving arms.

### Claim 9 (depends on 1)

The sensor element according to claim 1, wherein:
the piezoelectric body comprises
a pair of the base parts each comprising a long shape so that its two ends are separated in the x-axis direction, the base parts facing each other in the y-axis direction,
a pair of the driving arms which are respectively arranged bridging the pair of base parts and face each other in the x-axis direction, and
a pair of the detecting arms which extend from the pair of base parts in the y-axis direction at such positions that are between the pair of driving arms in the x-axis direction,
the plurality of excitation electrodes are in an arrangement capable of supplying voltages exciting the pair of driving arms in the x-axis direction, and
the sensor element further comprises a plurality of wirings connecting the plurality of excitation electrodes in such a connection relationships where voltages having inverse phases from each other making the pair of driving arms vibrate to inverse sides from each other in the x-axis direction are supplied from the plurality of excitation electrodes to the pair of driving arms.

### Claim 10 (depends on 1)

The sensor element according to claim 1, wherein:
the plurality of excitation electrodes comprises
in each of the pair of driving arms, a pair of first excitation electrodes which are located on a pair of first surfaces facing two sides of the z-axis direction, and
in each of the pair of driving arms, a pair of second excitation electrodes which are located on a pair of second surfaces facing two sides of the x-axis direction,
the plurality of detecting electrodes comprises
in the first arm or the second arm, a pair of first detecting electrodes which are located on a third surface facing a negative side in the x-axis direction at a positive side in the z-axis direction from a center of the third surface and on a fourth surface facing a positive side in the x-axis direction at a negative side in the z-axis direction from a center of the fourth surface, and
a pair of second detecting electrodes on the third surface at the negative side in the z-axis direction from the center of the third surface and on the fourth surface at the positive side in the z-axis direction from the center of the fourth surface, and
the plurality of wirings connect the pair of first excitation electrodes on each of the pair of driving arms to each other, connect the pair of second excitation electrodes on each of the pair of driving arms to each other, connect the pair of first excitation electrodes and the pair of second excitation electrodes between the pair of driving arms, connect the pair of first detecting electrodes to each other, and connect the pair of second detecting electrodes to each other.

### Claim 11 (depends on 1)

An angular velocity sensor, comprising
a sensor element according to claim 1,
a driving circuit which supplies voltages to the plurality of excitation electrodes, and
a detecting circuit which detects signals from the plurality of detecting electrodes.

### Claim 12 (depends on 11)

A multi-axis angular velocity sensor, comprising
an x-axis sensor which detects an angular velocity around an x-axis in an orthogonal coordinate system xyz,
a y-axis sensor which detects an angular velocity around a y-axis, and
a z-axis sensor which detects an angular velocity around a z-axis, wherein:
the x-axis sensor is an angular velocity sensor according to claim 11,
the driving arm, the first arm, and the second arm extend in the y-axis direction,
the driving circuit supplies voltages to the plurality of excitation electrodes so that the driving arms vibrate in the x-axis direction,
the y-axis sensor comprises
a piezoelectric body comprising a y-axis driving arm and a y-axis detecting arm which extend in the y-axis direction,
a y-axis driving circuit which supplies voltages to the y-axis driving arm so that the y-axis driving arm vibrates in the x-axis direction, and
a y-axis detecting circuit which detects signals generated by bending deformation of the y-axis detecting arm in the z-axis direction, and
the z-axis sensor comprises
a piezoelectric body comprising a z-axis driving arm and a z-axis detecting arm which extend in the y-axis direction,
a z-axis driving circuit which supplies voltages to the z-axis driving arm so that the z-axis driving arm vibrates in the x-axis direction, and
a z-axis detecting circuit which detects signals generated by bending deformations of the z-axis detecting arm in the x-axis direction.

### Claim 13 (depends on 12)

The multi-axis angular velocity sensor according to claim 12, wherein the piezoelectric body in the x-axis sensor, the piezoelectric body in the y-axis sensor, and the piezoelectric body in the z-axis sensor are fixed to each other.