# US 2019/0376203 A1 · Treatment device, plating apparatus including the same, conveying device, and treatment method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0376203 A1 - Document ID: US20190376203A1 - Status: Published application - Kind: A1 - Application number: 16/462,431 - Filed: 2017-09-12 - Published: 2019-12-12 - Earliest claimed: 2016-11-22 - Assignees: Ebara Corporation - Applicants: Ebara Corporation - Inventors: Kenya ITO; Hirohiko UEDA - Web page: https://patentgrep.com/patent/US20190376203A1 ## CPC - C25D 17/00: Constructional parts, or assemblies thereof, of cells for electrolytic coating - C25D 17/06: Suspending or supporting devices for articles to be coated - B65G 49/00: Conveying systems characterised by their application for specified purposes not otherwise provided for - C25D 17/001: {Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells} - C25D 17/08: {Supporting} racks {, i.e. not for suspending} - C25D 21/00: Processes for servicing or operating cells for electrolytic coating - H10P 52/00: Grinding, lapping or polishing of wafers, substrates or parts of devices - H10P 72/0458: {vertical arrangement} - H10P 72/0472: {comprising at least one polishing chamber} - H10P 72/0476: {comprising at least one plating chamber} - H10P 72/3202: {Mechanical details, e.g. rollers or belts} - H10P 72/3206: {the substrate being handled substantially vertically} - H10P 72/3211: {Changing orientation of the substrate, e.g. from a horizontal position to a vertical position} - H10P 72/3314: {Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers} - H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks - C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract To stably convey a substrate (workpiece) while suppressing the workpiece from bending. A treatment device is provided. This treatment device includes: a conveying part that conveys a workpiece in a state where a flat surface of the workpiece is inclined around a conveying directional axis relative to a horizontal plane; and a treatment part in which at least one of polishing and cleaning is performed on the flat surface of the workpiece, wherein the conveying part has a drive part configured to be brought into physical contact with an end part of the workpiece and apply force in a conveying direction to the workpiece, a first Bernoulli chuck arranged to face the flat surface of the workpiece, and a second Bernoulli chuck arranged to face an end face of an opposite end part to the end part of the workpiece. ## Claims ### Claim 1 A treatment device comprising: a conveying part that conveys a workpiece in a state where a flat surface of the workpiece is inclined around a conveying directional axis relative to a horizontal plane; and a treatment part in which at least one of polishing, cleaning and drying is performed on the flat surface of the workpiece, wherein the conveying part has a drive part configured to be brought into physical contact with an end part of the workpiece and apply force in a conveying direction to the workpiece, a first Bernoulli chuck arranged to face the flat surface of the workpiece, and a second Bernoulli chuck arranged to face an end face of an opposite end part to the end part of the workpiece. ### Claim 2 (depends on 1) The treatment device according to claim 1, wherein the conveying part is configured to convey the workpiece in a state where the flat surface of the workpiece is inclined at an angle not less than 5° and not more than 85° relative to the horizontal plane. ### Claim 3 (depends on 1) The treatment device according to claim 1, comprising a plurality of the first Bernoulli chucks arranged to face both surfaces of the workpiece. ### Claim 4 (depends on 1) The treatment device according to claim 1, comprising a plurality of the first Bernoulli chucks arranged along the conveying direction of the workpiece, wherein the treatment part is arranged between the plurality of the first Bernoulli chucks arranged along the conveying direction of the workpiece. ### Claim 5 (depends on 1) The treatment device according to claim 1, wherein the second Bernoulli chuck is longer in the conveying direction of the workpiece than the first Bernoulli chuck. ### Claim 6 (depends on 1) The treatment device according to claim 1, wherein the first Bernoulli chuck is arranged at a position on an opposite side of the workpiece from the treatment part. ### Claim 7 (depends on 1) The treatment device according to claim 1, comprising: an inlet port for a workpiece; an outlet port for the workpiece; a first conveying path on which the workpiece input from the inlet port is conveyed; a second conveying path on which the workpiece is conveyed in a reverse direction to a direction in which the workpiece is conveyed on the first conveying path and which communicates with the first conveying path and the outlet port; a vertical conveying path that connects the first conveying path and the second conveying path; and a vertically conveying mechanism that conveys the workpiece on the vertical conveying path in a vertical direction from the first conveying path toward the second conveying path. ### Claim 8 (depends on 7) The treatment device according to claim 7, wherein the vertically conveying mechanism has a third Bernoulli chuck configured to contactlessly hold the workpiece. ### Claim 9 (depends on 1) A plating apparatus including the treatment device according to claim 1, the apparatus comprising: a plating treatment part; and a substrate conveying part, wherein the substrate conveying part is configured to input the workpiece subjected to a plating treatment in the plating treatment part into an inlet port of the treatment device and to take out the workpiece treated by the treatment device from the outlet port. ### Claim 10 A treatment method comprising: a step of conveying a workpiece in a state where a flat surface of the workpiece is inclined around a conveying directional axis relative to a horizontal plane; and a treatment step of performing at least one of polishing, cleaning and drying on the flat surface of the workpiece, wherein the step of conveyance includes a step of physically applying force in a conveying direction to an end part of the workpiece, a step of holding the flat surface of the workpiece with a first Bernoulli chuck so as to limit movement of the workpiece in a thickness direction, and a step of holding an end face of an opposite end part to the end part of the workpiece with a second Bernoulli chuck so as to limit movement of the workpiece in an in-plane direction perpendicular to the conveying direction. ### Claim 11 (depends on 10) The treatment method according to claim 10, wherein the step of conveyance includes a step of conveying the workpiece in a state where the flat surface of the workpiece is inclined at an angle not less than 5° and not more than 85° relative to the horizontal plane. ### Claim 12 (depends on 10) The treatment method according to claim 10, wherein the step of holding with the first Bernoulli chuck has a step of holding both sides of the workpiece with a plurality of the first Bernoulli chucks. ### Claim 13 (depends on 10) The treatment method according to claim 10, wherein the step of conveyance has a step of conveying the workpiece through a first conveying path, a vertically conveying step of conveying the workpiece in a vertical direction from the first conveying path toward a second conveying path, and a step of conveying the workpiece through the second conveying path, and in the vertically conveying step, the workpiece is conveyed while being contactlessly held using a third Bernoulli chuck. ### Claim 14 (depends on 10) The treatment method according to claim 10, wherein the treatment step of performing at least one of polishing, cleaning and drying includes a step of performing it while pressing, onto the flat surface of the workpiece, a tape member which is held by a head part and fed at a predetermined speed in one direction. ### Claim 15 (depends on 10) The treatment method according to claim 10, wherein the treatment step of performing at least one of polishing, cleaning and drying includes a step of performing it while pressing, onto the flat surface of the workpiece, a sheet-like member held by a head part. ### Claim 16 A conveying device which conveys a workpiece in a state where a flat surface of the workpiece is inclined around a conveying directional axis relative to a horizontal plane, the device comprising: a drive part configured to be brought into physical contact with an end part of the workpiece and apply force in a conveying direction to the workpiece; a first Bernoulli chuck arranged to face the flat surface of the workpiece; and a second Bernoulli chuck arranged to face an end face of an opposite end part to the end part of the workpiece.