# US 2019/0375603 A1 · System for transferring substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0375603 A1 - Document ID: US20190375603A1 - Status: Published application - Kind: A1 - Application number: 16/256,960 - Filed: 2019-01-24 - Published: 2019-12-12 - Earliest claimed: 2018-06-07 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Youngsoo KO; Seungkyu PARK - Web page: https://patentgrep.com/patent/US20190375603A1 ## CPC - B65G 47/917: {control arrangements} - H05K 13/0061: {Tools for holding the circuit boards during processing; handling transport of printed circuit boards} - B25J 11/0095: {Manipulators transporting wafers} - B25J 13/081: {Touching devices, e.g. pressure-sensitive} - B25J 15/0616: {with vacuum} - G01L 1/18: using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material - G01L 5/009: {Force sensors associated with material gripping devices} - H05K 13/0409: {Sucking devices} - H05K 13/082: {Integration of non-optical monitoring devices, i.e. using non-optical inspection means, e.g. electrical means, mechanical means or X-rays} - H05K 13/0882: {Control systems for mounting machines or assembly lines, e.g. centralized control, remote links, programming of apparatus and processes as such (H05K13/083 takes precedence)} - H05K 13/089: {Calibration, teaching or correction of mechanical systems, e.g. of the mounting head} - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) ## Abstract A system for transferring a substrate may adjust a suction force to a suitable level. The system may include a work table, a picker, and a pressure measuring unit. The work table may include a work area for supporting the substrate. The picker may be disposed above the work table and may include a suction unit for providing the suction force. The pressure measuring unit may overlap the suction unit and may include a pressure-sensitive element for facilitating adjustment of the suction force. ## Claims ### Claim 1 A system for transferring a substrate, the system comprising: a work table comprising a work area for supporting the substrate; a picker comprising a suction unit; and a pressure measuring unit comprising a pressure sensor and positioned between the picker and a portion of the work table in a direction perpendicular to the work area. ### Claim 2 (depends on 1) The system of claim 1, wherein the suction unit overlaps the pressure sensor. ### Claim 3 (depends on 1) The system of claim 1, wherein the suction unit comprises a first-type suction hole and a suction surface surrounding the first-type suction hole. ### Claim 4 (depends on 3) The system of claim 3, wherein the pressure measuring unit comprises: a surface pressure sensor overlapping the suction surface; and a first hole pressure sensor overlapping the first-type suction hole. ### Claim 5 (depends on 4) The system of claim 4, wherein the surface pressure sensor is positioned closer to a perimeter of the suction surface than to the first-type suction hole. ### Claim 6 (depends on 4) The system of claim 4, wherein the suction unit further comprises a second-type suction hole, and wherein the surface pressure sensor is positioned between the first-type suction hole and the second-type suction hole. ### Claim 7 (depends on 1) The system of claim 1, wherein the pressure measuring unit directly contacts the work table. ### Claim 8 (depends on 7) The system of claim 7, wherein the pressure measuring unit is disposed at the work area of the work table. ### Claim 9 (depends on 1) The system of claim 1, wherein the work table further comprises a non-work area disposed adjacent to the work area. ### Claim 10 (depends on 9) The system of claim 9, wherein the pressure measuring unit is disposed at the non-work area of the work table. ### Claim 11 (depends on 1) The system of claim 1, wherein the pressure measuring unit further comprises: a base layer on which the pressure sensor is disposed; and a protective layer disposed on the base layer with the pressure sensor interposed between the protective layer and the base layer. ### Claim 12 (depends on 1) The system of claim 1, wherein the pressure sensor is a piezoelectric element or a load cell. ### Claim 13 A system for transferring a substrate, the system comprising: a work table comprising a work area for supporting the substrate; and a picker disposed above the work table and comprising a suction unit, wherein the suction unit comprises: a nozzle portion disposed at an end of the suction unit; and a pressure measuring unit disposed at the nozzle portion and comprising pressure sensors. ### Claim 14 (depends on 13) The system of claim 13, wherein the nozzle portion comprises a suction surface, and wherein the pressure sensors are disposed at the suction surface. ### Claim 15 (depends on 14) The system of claim 14, wherein the nozzle portion further comprises a plurality of suction holes, wherein each of the suction holes is surrounded by the suction surface in a bottom view of the system, and wherein the pressure sensors are disposed at the suction surface and are spaced from the suction holes in the bottom view of the system. ### Claim 16 (depends on 13) The system of claim 13, wherein the pressure measuring unit comprises: a base layer on which the pressure sensors are disposed; and a protective layer disposed on the base layer with the pressure sensor interposed between the protective layer and the base layer. ### Claim 17 (depends on 16) The system of claim 16, wherein the pressure sensors and the protective layer are disposed between the base layer and the nozzle portion. ### Claim 18 (depends on 16) The system of claim 16, wherein at least one of the protective layer and the pressure sensors comprises amorphous silicon. ### Claim 19 (depends on 13) The system of claim 13, wherein at least one of the pressure sensors is a piezoelectric element or a load cell. ### Claim 20 (depends on 16) The system of claim 16, wherein the protective layer does not fill a space between adjacent ones of the pressure sensors, and wherein no solid material is filled between the adjacent ones of the pressure sensors.