Monolithically configured spectroscopic instrument
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsHeinrich GRUEGER, Jens KNOBBE, Tino PUEGNER
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Abstract
A spectroscopic instrument includes a first aperture limiting device, a second aperture limiting device, a first mirror, a movable MEMS mirror, and a dispersive element spatially separate from the MEMS mirror, the movable MEMS mirror being movable in relation to the dispersive element, the movable MEMS mirror being monolithically configured as a common component with at least one of the first aperture limiting device, the second aperture limiting device, and the dispersive element, and the first and second aperture limiting devices being arranged to be spatially separate from the movable MEMS mirror and having a lateral offset from a rotational axis of the movable MEMS mirror.
Claims27
Spectroscopic instrument comprising
- a first aperture limiting device, a second aperture limiting device, a first mirror, a movable MEMS mirror, and a dispersive element spatially separate from the MEMS mirror, the movable MEMS mirror being movable in relation to the dispersive element,
- the first mirror being configured to influence, in a beam-shaping manner, electromagnetic radiation which enters through the first aperture limiting device, and to direct the influenced radiation to the movable MEMS mirror,
- the moveable MEMS mirror being configured to reflect the influenced radiation to the dispersive element,
- the dispersive element being configured to spectrally split up the influenced radiation and to reflect it back, within a limited wavelength range, to the moveable MEMS mirror, and the movable MEMS mirror further being configured to reflect the spectrally split-up radiation comprising the limited wavelength range to the first mirror or to a second mirror and from there to the second aperture limiting device,
- the movable MEMS mirror being monolithically configured as a common component with at least one of the first aperture limiting device, the second aperture limiting device, and the dispersive element, and the first and second aperture limiting devices being arranged to be spatially separate from the movable MEMS mirror and comprising a lateral offset from a rotational axis of the movable MEMS mirror.
Dependencies are inferred from the claim text.