Detector, surface property measuring machine, and roundness measuring machine

A detector comprising:

• a stylus configured to support a contact which is brought into contact with a surface of an object to be measured;
• a holder configured to hold the stylus;
• a measuring part configured to swingably hold the holder with a rotating shaft and detect a displacement of the holder;
• and
• a body configured to accommodate the measuring part,
• wherein the holder holds the stylus such that a stylus axis being an axis of the stylus and a body axis being an axis of the body are in parallel with each other, and the stylus axis and the body axis are offset in a first direction orthogonal to the body axis and the rotating shaft, and
• the body is formed into a cylindrical shape.

A detector comprising:

• a stylus configured to support a contact which is brought into contact with a surface of an object to be measured;
• a holder configured to hold the stylus;
• a measuring part configured to swingably hold the holder with a rotating shaft and detect a displacement of the holder;
• and
• a body configured to accommodate the measuring part,
• wherein the holder holds the stylus such that a stylus axis being an axis of the stylus and a body axis being an axis of the body are in parallel with each other, and the stylus axis and the body axis are offset in a first direction orthogonal to the body axis and the rotating shaft, and
• wherein the measuring part includes a parallel link mechanism comprising:
• a fixed link having a pair of rotating shafts;
• a pair of movable links one ends of which are respectively supported to be rotatable by the pair of the rotating shafts;
• and
• a swinging link configured to hold the stylus, the swinging link being swingably supported by rotating shafts which are respectively provided in another ends of the pair of the movable links.

A roundness measuring machine configured to include a surface property measuring machine, the surface property measuring machine comprising:

• a detector including a stylus configured to support a contact which is brought into contact with a surface of an object to be measured, a holder configured to hold the stylus, a measuring part configured to swingably hold the holder with a rotating shaft and detect a displacement of the holder, and a body configured to accommodate the measuring part, wherein the holder holds the stylus such that a stylus axis being an axis of the stylus and a body axis being an axis of the body are in parallel with each other, and the stylus axis and the body axis are offset in a first direction orthogonal to the body axis and the rotating shaft;
• a relative moving part configured to cause the contact to come into contact with a measurement surface of an object to be measured, and relatively move the object to be measured and the contact;
• and
• a surface property measuring part configured to measure a surface property of the object to be measured based on a detection result of the detector,
• wherein the relative moving part includes a rotating stage configured to rotate an object to be measured, and
• the surface property measuring part measures roundness of the object to be measured.