Signal processing apparatus, inertial sensor, acceleration measurement method, electronic apparatus, and program

An inertial sensor, comprising:

• a sensor element including
• an element main body that includes a movable portion movable by reception of an acceleration along at least a uniaxial direction,
• a first acceleration detector unit that outputs a first detection signal, the first detection signal including information related to the acceleration that acts on the movable portion and having an alternating-current waveform corresponding to the acceleration, and
• a second acceleration detector unit that outputs a second detection signal, the second detection signal including the information related to the acceleration and having an output waveform in which an alternating-current component corresponding to the acceleration is superimposed on a direct-current component;
• and
• a controller including
• an acceleration arithmetic unit that extracts a dynamic acceleration component and a static acceleration component from the acceleration on a basis of the first detection signal and the second detection signal.

An acceleration measurement method, comprising:

• acquiring a first detection signal including information related to an acceleration along at least a uniaxial direction and having an alternating-current waveform corresponding to the acceleration;
• acquiring a second detection signal including the information related to the acceleration and having an output waveform in which an alternating-current component corresponding to the acceleration is superimposed on a direct-current component;
• and
• extracting a dynamic acceleration component and a static acceleration component from the acceleration on a basis of the first detection signal and the second detection signal.

An electronic apparatus, comprising

• an inertial sensor including
• a sensor element including
• an element main body that includes a movable portion movable by reception of an acceleration along at least a uniaxial direction,
• a first acceleration detector unit that outputs a first detection signal, the first detection signal including information related to the acceleration that acts on the movable portion and having an alternating-current waveform corresponding to the acceleration, and
• a second acceleration detector unit that outputs a second detection signal, the second detection signal including the information related to the acceleration and having an output waveform in which an alternating-current component corresponding to the acceleration is superimposed on a direct-current component, and
• a controller including
• an acceleration arithmetic unit that extracts a dynamic acceleration component and a static acceleration component from the acceleration on a basis of the first detection signal and the second detection signal.

A program causing a signal processing apparatus to execute:

• acquiring a first detection signal including information related to an acceleration along at least a uniaxial direction and having an alternating-current waveform corresponding to the acceleration;
• acquiring a second detection signal including the information related to the acceleration and having an output waveform in which an alternating-current component corresponding to the acceleration is superimposed on a direct-current component;
• and
• extracting a dynamic acceleration component and a static acceleration component from the acceleration on a basis of the first detection signal and the second detection signal.