# US 2019/0356299 A1 · Surface acoustic wave device

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- Number: US 2019/0356299 A1
- Document ID: US20190356299A1
- Status: Published application
- Kind: A1
- Application number: 16/529,879
- Filed: 2019-08-02
- Published: 2019-11-21
- Earliest claimed: 2017-02-03
- Assignees: Murata Manufacturing Co., Ltd.
- Applicants: Murata Manufacturing Co., Ltd.
- Inventors: Koichiro KAWASAKI
- Web page: https://patentgrep.com/patent/US20190356299A1

## CPC

- H03H 9/1071: {the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device}
- H03H 9/1092: {the enclosure being defined by a cover cap mounted on an element forming part of the surface acoustic wave [SAW] device on the side of the IDT's}
- H03H 9/02543: {Characteristics of substrate, e.g. cutting angles}
- H03H 9/02559: {of lithium niobate or lithium-tantalate substrates}
- H03H 9/059: {consisting of mounting pads or bumps}
- H03H 9/145: for networks using surface acoustic waves
- H03H 9/25: Constructional features of resonators using surface acoustic waves {(devices for manipulating acoustic surface waves in general G10K11/36)}
- H03H 9/542: {including passive elements (H03H9/545 takes precedence)}
- H03H 9/6483: {Ladder SAW filters}
- H03H 9/6489: {Compensation of undesirable effects}
- H03H 9/68: using surface acoustic waves
- H03H 9/725: {Duplexers}
- H03H 9/6436: {having one acoustic track only}
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

A surface acoustic wave device includes a piezoelectric substrate, functional elements on the piezoelectric substrate, a cover portion that opposes the piezoelectric substrate with a support layer interposed therebetween, and an input/output terminal on the cover portion. At least a portion of the functional elements includes an interdigital transducer electrode, and a surface acoustic wave resonator is defined by the piezoelectric substrate and the IDT electrode. The functional elements include a filter that passes a signal in a predetermined frequency band, and a cancel circuit which is connected in parallel to the filter and attenuates a signal outside the predetermined frequency band in signals output from the output terminal. A portion of a wiring pattern connecting a first functional element and a second functional element included in the plurality of functional elements is provided on the cover portion.

## Claims

### Claim 1

A surface acoustic wave device comprising:
a piezoelectric substrate;
a plurality of functional elements on the piezoelectric substrate;
a cover portion that opposes the piezoelectric substrate with a support layer interposed between the piezoelectric substrate and the cover portion; and
an input terminal and an output terminal on the cover portion; wherein at least a portion of the plurality of functional elements includes an interdigital transducer (IDT) electrode, and a surface acoustic wave resonator is defined by the piezoelectric substrate and the IDT electrode;
the plurality of functional elements include:
a filter that passes a signal in a predetermined frequency band in input signals from the input terminal to the output terminal; and
a cancel circuit connected to the filter in parallel between the input terminal and the output terminal;
the cancel circuit attenuates a signal outside the predetermined frequency band in signals output from the output terminal; and
a portion of a wiring pattern connecting a first functional element and a second functional element included in the plurality of functional elements is provided on the cover portion.

### Claim 2 (depends on 1)

The surface acoustic wave device according to claim 1, wherein
the piezoelectric substrate is provided with a first through-electrode and a second through-electrode penetrating through the support layer and the cover portion; and
the wiring pattern in the cover portion is connected to the first functional element by the first through-electrode, and is connected to the second functional element by the second through-electrode.

### Claim 3 (depends on 1)

The surface acoustic wave device according to claim 1, further comprising:
a protective resin covering a second surface opposite to a first surface facing the piezoelectric substrate on the cover portion; wherein
a wiring pattern on the cover portion is provided between the protective resin and the second surface of the cover portion; and
a wiring pattern on the cover portion is connected to the first functional element via a first wiring provided on a first side surface of the cover portion, and is connected to the second functional element via a second wiring provided on a second side surface of the cover portion.

### Claim 4 (depends on 1)

The surface acoustic wave device according to claim 1,
wherein at least a portion of a wiring pattern on the piezoelectric substrate intersects with a wiring pattern on the cover portion when the piezoelectric substrate is viewed in a plan view.

### Claim 5 (depends on 1)

The surface acoustic wave device according to claim 1,
wherein a portion of the plurality of functional elements is overlapped with a wiring pattern on the cover portion when the piezoelectric substrate is viewed in a plan view.

### Claim 6 (depends on 1)

The surface acoustic wave device according to claim 1,
wherein at least a portion of a wiring pattern connecting the functional elements included in the filter to each other and at least a portion of a wiring pattern extending from the input terminal to the output terminal through the cancel circuit are provided on the cover portion.

### Claim 7 (depends on 6)

The surface acoustic wave device according to claim 6, wherein
the first functional element is the filter;
the second functional element is the cancel circuit; and
at least a portion of a wiring pattern connecting the filter and the cancel circuit is provided on the cover portion.

### Claim 8 (depends on 1)

The surface acoustic wave device according to claim 1, wherein
the filter is a reception filter;
the input terminal is connected to an antenna, and the output terminal is connected to a reception circuit; and
the cancel circuit is connected in parallel to the reception filter.

### Claim 9 (depends on 1)

The surface acoustic wave device according to claim 1, wherein
the filter is a transmission filter;
the input terminal is connected to a transmission circuit, and the output terminal is connected to an antenna; and
the cancel circuit is connected in parallel to the transmission filter.

### Claim 10 (depends on 1)

The surface acoustic wave device according to claim 1, wherein
the cancel circuit includes:
an amplitude adjustment circuit that adjusts an amplitude of the input signal; and
a phase adjustment circuit that adjusts a phase of the input signal;
the first functional element is the amplitude adjustment circuit, and the second functional element is the phase adjustment circuit; and
at least a portion of a wiring pattern connecting the amplitude adjustment circuit and the phase adjustment circuit is provided on the cover portion.

### Claim 11 (depends on 1)

The surface acoustic wave device according to claim 1, wherein
the cancel circuit further includes:
a first amplitude adjustment circuit that adjusts an amplitude of the input signal;
a phase adjustment circuit that adjusts a phase of a signal from the first amplitude adjustment circuit; and
a second amplitude adjustment circuit that adjusts an amplitude of a signal from the phase adjustment circuit;
the first functional element is the phase adjustment circuit;
the second functional element is at least one of the first amplitude adjustment circuit and the second amplitude adjustment circuit; and
at least one of a wiring pattern connecting the first amplitude adjustment circuit and the phase adjustment circuit, and a wiring pattern connecting the phase adjustment circuit and the second amplitude adjustment circuit is provided on the cover portion.

### Claim 12 (depends on 1)

The surface acoustic wave device according to claim 1, wherein
the filter includes:
a transmission filter that filters a signal from a transmission circuit received at a first terminal and output the signal to an antenna; and
a reception filter that filters a signal received from the antenna and output the signal to a reception circuit from a second terminal;
the cancel circuit reduces an influence of a signal received at the first terminal on a signal output from the second terminal; and
a portion of a wiring pattern connected to the second terminal from the first terminal through the cancel circuit is provided on the cover portion.

### Claim 13 (depends on 1)

The surface acoustic wave device according to claim 1, wherein the piezoelectric substrate is made from a single crystal material of any one of lithium tantalate (LiTaO3), lithium niobate (LiNbO3), alumina (Al2O3), and sapphire, or a laminated material made of LiTaO3, LiNbO3, or silicon (Si).

### Claim 14 (depends on 1)

A ladder filter comprising;
the surface acoustic wave device according to claim 1; wherein
the ladder filter includes:
an input terminal and an output terminal;
series arm portions; and
parallel portions;
the series arm resonance portions are connected in series to a series arm provided between the input terminal and the output terminal; and
the parallel arm resonance portions provided on a parallel arm connected between the series arm and a ground potential.

### Claim 15 (depends on 14)

The ladder filter according to claim 14, wherein at least one of the series arm portions defines a longitudinally coupled resonator filter including the surface acoustic wave resonator.

### Claim 16 (depends on 10)

The surface acoustic wave device according to claim 10,
wherein capacitors define the amplitude adjustment circuit, and a surface acoustic wave vibrator defines the phase adjustment circuit.

### Claim 17 (depends on 1)

The surface acoustic wave device according to claim 1, further comprising:
a protective resin covering a second surface of the cover portion opposite to a first surface of the cover portion facing the piezoelectric substrate; wherein
a wiring pattern on the cover portion is disposed between the protective resin and the second surface of the cover portion; and
the input terminal and the output terminal extend through the protective resin covering.

### Claim 18 (depends on 1)

The surface acoustic wave device according to claim 1,
wherein the plurality of functional elements are housed in at least once space defined between the cover portion, the support layer, and the cover portion.

### Claim 19 (depends on 13)

The surface acoustic wave device according to claim 13,
wherein capacitors define the first amplitude adjustment circuit, and a surface acoustic wave vibrator defines the phase adjustment circuit.

### Claim 20 (depends on 3)

The surface acoustic wave device according to claim 3,
wherein the plurality of functional elements are housed in at least once space defined between the cover portion, the support layer, and the piezoelectric substrate.
