# US 2019/0356104 A1 · Gas laser device

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- Number: US 2019/0356104 A1
- Document ID: US20190356104A1
- Status: Published application
- Kind: A1
- Application number: 16/525,786
- Filed: 2019-07-30
- Published: 2019-11-21
- Earliest claimed: 2017-03-30
- Assignees: Murata Manufacturing Co., Ltd.
- Applicants: Murata Manufacturing Co., Ltd.
- Inventors: Futoshi Ishii
- Web page: https://patentgrep.com/patent/US20190356104A1

## CPC

- H01S 3/034: Optical devices within, or forming part of, the tube, e.g. windows, mirrors (reflectors having variable properties or positions for initial adjustment of the resonator H01S3/086)
- H01S 3/03: of gas laser discharge tubes
- H01S 3/08054: {Passive cavity elements acting on the polarization, e.g. a polarizer for branching or walk-off compensation (quarter-wave plates in a Q-switch laser H01S3/1124, H01S3/115)}
- H01S 3/225: comprising an excimer or exciplex
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A gas laser device including a gas laser tube having an internal space in which gas is enclosed, laser light being generated by exciting the gas; and a window member mounted at one end side in an axial direction of the gas laser tube. Moreover, the window member has a transmission region that is a uniaxial crystal, with the transmission region being configured such that the laser light is transmitted therethrough. The window member is mounted on the gas laser tube such that an optical axis of the laser light transmitting the transmission region and an optic axis of the uniaxial crystal are substantially parallel to each other.

## Claims

### Claim 1

A gas laser device comprising:
a gas laser tube having an internal space enclosing gas, such that laser light is generated by exciting the gas; and
a window member mounted at one end of the gas laser tube in an axial direction,
wherein the window member has a transmission region comprising a uniaxial crystal, and
wherein the window member is mounted at the one end of the gas laser tube, such that the laser light transmitting through the transmission region has an optical axis that is substantially parallel to an optical axis of the uniaxial crystal.

### Claim 2 (depends on 1)

The gas laser device according to claim 1, wherein the transmission region is configured to transmit therethrough the laser light generated by exciting the gas.

### Claim 3 (depends on 1)

The gas laser device according to claim 1, wherein the window member comprises a main surface that includes the transmission region, and at least one mark disposed on the window member that is configured to indicate a direction of the optical axis in a plan view of the main surface.

### Claim 4 (depends on 1)

The gas laser device according to claim 1, wherein the window member has first and second main surfaces that oppose each other, and a side surface extending between the first main surface and the second main surface.

### Claim 5 (depends on 4)

The gas laser device according to claim 4, wherein the window member comprises first and second marks disposed on the side surface of the window member, with the first and second marks being configured to indicate a direction of the optical axis in a plan view of the first and second main surfaces.

### Claim 6 (depends on 5)

The gas laser device according to claim 5, wherein the first mark is located at a position different from that of the second mark in the plan view of at least one of the first and second main surfaces.

### Claim 7 (depends on 6)

The gas laser device according to claim 6, wherein, in a plan view of the side surface, the first mark is disposed at the first main surface side and the second mark is disposed at the second main surface side.

### Claim 8 (depends on 5)

The gas laser device according to claim 5, wherein the first mark and the second mark each have one of a recess shape, a projection shape, or a recess/projection shape.

### Claim 9 (depends on 8)

The gas laser device according to claim 8, wherein the gas laser tube comprises a mount configured to mount the window member, such that the first mark and the second mark are fitted thereto.

### Claim 10 (depends on 1)

The gas laser device according to claim 1, wherein the window member is positioned with respect to the gas laser tube such that an incident angle at which the laser light is incident on the window member is substantially equal to a Brewster angle.

### Claim 11 (depends on 1)

The gas laser device according to claim 1, wherein the uniaxial crystal is artificial quartz.

### Claim 12 (depends on 1)

The gas laser device according to claim 1, wherein the window member has a circular flat plate shape.

### Claim 13 (depends on 1)

The gas laser device according to claim 1, wherein the window member is configured such that a portion of an S-polarized component of the laser light is reflected on a main surface and becomes reflected light and a P-polarized component of the laser light has a reflectance of zero on the main surface.

### Claim 14 (depends on 13)

The gas laser device according to claim 13, wherein the window member is mounted at the one end of the gas laser tube, such that an incident angle of the laser light is substantially equal to the Brewster angle.

### Claim 15 (depends on 13)

The gas laser device according to claim 13, wherein the window member is mounted at the one end of the gas laser tube, such that a reflectance of the P-polarized component is minimized.

### Claim 16

A gas laser device comprising:
a gas laser tube configured to generate a laser light; and
a window member with a transmission region comprising a uniaxial crystal, and being mounted to the gas laser tube, such that the laser light transmitted through the transmission region has an optical axis that is substantially parallel to an optical axis of the uniaxial crystal.

### Claim 17 (depends on 16)

The gas laser device according to claim 16, wherein the gas laser tube has an internal space with gas, such that the gas laser tub generates the laser light when the gas is excited.

### Claim 18 (depends on 16)

The gas laser device according to claim 16,
wherein the window member has first and second main surfaces that oppose each other, and a side surface extending between the first main surface and the second main surface, and
wherein the window member comprises first and second marks disposed on the side surface of the window member, with the first and second marks being configured to indicate a direction of the optical axis in a plan view of the first and second main surfaces.

### Claim 19 (depends on 18)

The gas laser device according to claim 18, wherein the gas laser tube comprises a mount configured to mount the window member, such that the first mark and the second mark are fitted thereto.

### Claim 20 (depends on 18)

The gas laser device according to claim 18, wherein the window member is positioned with respect to the gas laser tube such that an incident angle at which the laser light is incident on the window member is substantially equal to a Brewster angle.
