# US 2019/0355855 A1 · Method for depositing a conductive coating on a surface

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- Number: US 2019/0355855 A1
- Document ID: US20190355855A1
- Status: Published application
- Kind: A1
- Application number: 16/526,315
- Filed: 2019-07-30
- Published: 2019-11-21
- Earliest claimed: 2012-11-06
- Assignees: OTI Lumionics Inc.
- Applicants: OTI Lumionics Inc.
- Inventors: Michael Helander; Jacky Qiu; Zhibin Wang; Zheng-Hong Lu
- Web page: https://patentgrep.com/patent/US20190355855A1

## CPC

- C23C 14/20: on organic substrates
- C09D 5/24: Electrically-conducting paints {(conductive materials H01B1/00)}
- C23C 14/024: {Deposition of sublayers, e.g. to promote adhesion of the coating (C23C14/027 takes precedence)}
- C23C 14/24: Vacuum evaporation
- H10F 71/00: Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00)
- H10F 77/707: {of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate}
- H10K 30/81: Electrodes
- H10K 50/82: Cathodes
- H10K 71/60: Forming conductive regions or layers, e.g. electrodes
- H10K 85/211: {Fullerenes, e.g. C60}
- Y02E 10/549: Organic PV cells
- Y10T 428/30: Self-sustaining carbon mass or layer with impregnant or other layer
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- C09D: COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR (cosmetics A61K; processes for applying liquids or other fluent materials to surfaces, in general, B05D; staining wood B27K5/02; glazes or vitreous enamels C03C; natural resins, French polish, drying-oils, driers, turpentine, per se, C09F; polishing compositions other than French polish, ski waxes C09G; adhesives or use of materials as adhesives C09J; materials for sealing or packing joints or covers C09K3/10; materials for stopping leaks C09K3/12; processes for the electrolytic or electrophoretic production of coatings C25D)
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method for depositing a conductive coating on a surface is provided, the method including treating the surface by depositing fullerene on the surface to produce a treated surface and depositing the conductive coating on the treated surface. The conductive coating generally includes magnesium. A product and an organic optoelectronic device produced according to the method are also provided.

## Claims

### Claim 1

A system for depositing a conductive coating on a surface of a substrate, the system comprising:
an evaporation source for evaporating a source material, the source material including magnesium;
a shadow mask defining an aperture, the shadow mask being arranged between the evaporation source and the substrate;
wherein the evaporation source is configured to direct the evaporated source material towards the surface of the substrate,
wherein an organic coating covers at least a portion of the shadow mask for inhibiting deposition of the source material on the shadow mask, while allowing passage of at least some of the evaporated source material through the aperture.

### Claim 2 (depends on 1)

The system of claim 1, wherein the organic coating is disposed on a surface of the shadow mask proximal to the evaporation source.

### Claim 3 (depends on 1)

The system of claim 1, wherein the organic coating covers at least the portion of the shadow mask defining the aperture.

### Claim 4 (depends on 1)

The system of claim 1, wherein the source material includes substantially pure magnesium.

### Claim 5 (depends on 1)

The system of claim 1, wherein the source material includes magnesium alloy.

### Claim 6

A method for depositing a conductive coating on a surface of a substrate, the method comprising:
a) providing an evaporation source for evaporating a source material including magnesium towards the surface of the substrate;
b) providing a shadow mask defining an aperture between the evaporation source and the substrate; and
c) providing an organic coating covering at least a portion of the surface of the shadow mask for inhibiting deposition of the source material on the shadow mask, while allowing passage of at least some of the evaporated source material through the aperture.

### Claim 7 (depends on 6)

The method of claim 6, wherein the organic coating is removed and reapplied.

### Claim 8 (depends on 6)

The method of claim 6, wherein the organic coating is disposed on a surface of the shadow mask proximal to the evaporation source.

### Claim 9 (depends on 6)

The method of claim 6, wherein the organic coating covers at least the portion of the shadow mask defining the aperture.

### Claim 10 (depends on 6)

The method of claim 6, wherein the source material includes substantially pure magnesium.

### Claim 11 (depends on 6)

The method of claim 6, wherein the source material includes magnesium alloy.
