# US 2019/0355606 A1 · Electrostatic substrate holder > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0355606 A1 - Document ID: US20190355606A1 - Status: Published application - Kind: A1 - Application number: 16/482,316 - Filed: 2017-03-09 - Published: 2019-11-21 - Earliest claimed: 2017-03-09 - Assignees: EV Group E. Thallner GmbH - Applicants: EV Group E. Thallner GmbH - Inventors: Christoph Flotgen - Web page: https://patentgrep.com/patent/US20190355606A1 ## CPC - H10P 72/72: using electrostatic chucks - H10P 72/722: {Details of electrostatic chucks} - H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins} - H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks - H10P 72/0602: {Temperature monitoring} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An electrostatic substrate holder for accommodating and holding a substrate, a method for processing a substrate, and a processing plant. The electrostatic substrate holder includes a stator having electrodes that generate an electrostatic holding force for fixing the substrate. ## Claims ### Claim at position 1 1-17. (canceled) ### Claim 18 An electrostatic substrate holder for accommodating and holding a substrate, said electrostatic substrate holder comprising: a rotor having a holder for fixing the substrate on a holding surface, a stator for accommodating and bearing the rotor, electrodes for generating an electrostatic holding force for fixing the substrate, wherein the stator has the electrodes, whereby the electrodes are separated from the holding surface, and wherein the rotor is mounted by means of electrically conductive bearing elements, the electrically conductive bearing elements contacting the electrodes of the stator. ### Claim 19 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the rotor is mounted by means of: ball bearings and/or deep groove ball bearings and/or angular contact ball bearings and/or spherical roller bearings and/or axial bearings and/or radiax bearings. ### Claim 20 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the thickness of the holder in the Z direction is less than 100 mm. ### Claim 21 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the distance between the electrodes and the holding surface is less than 100 millimetres. ### Claim 22 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the electrostatic substrate holder includes depressions arranged on a side of the holder facing away from the substrate, said electrodes arranged in the depressions, wherein the depressions are constructed concentrically and/or as channels. ### Claim 23 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the electrodes are constructed as rings. ### Claim 24 (depends on 23) The electrostatic substrate holder according to claim 23, wherein the rings are arranged in an equidistant and/or concentric manner. ### Claim 25 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the electrodes are constructed as circle segments, and/or circular ring sectors. ### Claim 26 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the holder is formed as a honeycomb structure. ### Claim 27 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the electrostatic substrate holder includes a positioning, holding and moving system for moving the substrate and/or the holder. ### Claim 28 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the substrate and/or the holder are movable in at least three degrees of freedom. ### Claim 29 (depends on 28) The electrostatic substrate holder according to claim 28, wherein a substrate and/or the holder are movable in all six degrees of freedom. ### Claim 30 (depends on 27) The electrostatic substrate holder according to claim 27, wherein the positioning, holding and movement system is constructed for at least one degree of freedom using a coarse drive and a fine drive. ### Claim 31 (depends on 30) The electrostatic substrate holder according to claim 30, wherein the coarse and fine drives of the positioning, holding and movement system are configured such that in a non-moved state without operating voltage and/or current and/or other power supply, the coarse and fine drives maintain the respective position and/or stop. ### Claim 32 (depends on 18) The electrostatic substrate holder according to claim 18 wherein the electrostatic substrate holder includes: a central control unit and/or a regulating unit for controlling and/or regulating movements and/or procedures. ### Claim 33 (depends on 32) The electrostatic substrate holder according to claim 32, wherein the central control unit and/or the regulating unit is for the fixing of the substrate, the position of the holder, the speeds, and/or the accelerations of the holder. ### Claim 34 (depends on 18) The electrostatic substrate holder according to claim 18, wherein the electrostatic substrate holder includes: at least one sensor for measuring influencing factors, and at least one actuator for controlling and/or regulating as a function of the measured influencing factors. ### Claim 35 (depends on 34) The electrostatic substrate holder according to claim 34, wherein the at least one sensor includes a distance and/or a position sensor. ### Claim 36 (depends on 34) The electrostatic substrate holder according to claim 34, wherein the at least one actuator includes a position encoder and/or an angle encoder. ### Claim 37 (depends on 18) A processing plant, having a processing apparatus for processing a substrate and an electrostatic substrate holder for holding the substrate according to claim 18. ### Claim 38 (depends on 18) A method for processing a substrate, wherein the substrate is held and rotated by means of an electrostatic substrate holder according to claim 18.