# US 2019/0355552 A1 · Charged Particle Beam Apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0355552 A1 - Document ID: US20190355552A1 - Status: Published application - Kind: A1 - Application number: 16/482,765 - Filed: 2017-03-24 - Published: 2019-11-21 - Earliest claimed: 2017-03-24 - Assignees: Hitachi High-Technologies Corporation - Applicants: Hitachi High-Technologies Corporation - Inventors: Shunsuke MIZUTANI; Shahedul HOQUE; Uki IKEDA; Makoto SUZUKI - Web page: https://patentgrep.com/patent/US20190355552A1 ## CPC - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - H01J 37/1474: {Scanning means} - H01J 37/244: Detectors; Associated components or circuits therefor - H01J 2237/1415: Bores or yokes, i.e. magnetic circuit in general - H01J 2237/2443: Scintillation detectors - H01J 2237/24475: Scattered electron detectors - H01J 2237/24485: Energy spectrometers - H01J 2237/281: Bottom of trenches or holes - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract The present invention provides a charged particle beam apparatus that covers a wide range of detection angles of charged particles emitted from a sample. Accordingly, the present invention proposes a charged particle beam apparatus that is provided with an objective lens for converging charged particle beams emitted from a charged particle source, and a detector for detecting charged particles emitted from a sample, wherein: the objective lens includes an inner magnetic path and an outer magnetic path which are formed so as to enclose a coil; the inner magnetic path comprises a first inner magnetic path disposed at a position opposite to an optical axis of the charged particle beams and a second inner magnetic path which is formed at a slant with respect to the optical axis of the charged particle beams and which includes a leading end of the magnetic path; and a detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end of the magnetic path and that is parallel to the optical axis of the charged particle beams. ## Claims ### Claim 1 A charged particle beam apparatus, comprising: an objective lens that is configured to converge charged particle beams emitted from a charged particle source; and a detector that is configured to detect charged particles emitted from a sample, wherein the objective lens includes an inner magnetic path and an outer magnetic path that are formed so as to enclose a coil, the inner magnetic path includes a first inner magnetic path that is disposed at a position opposite to an optical axis of the charged particle beams, and a second inner magnetic path that is formed at a slant with respect to the optical axis of the charged particle beams and includes a leading end of the magnetic path, and a detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end of the magnetic path and is parallel to the optical axis of the charged particle beams. ### Claim 2 (depends on 1) The charged particle beam apparatus according to claim 1, wherein the detection surface is disposed on a charged particle source side from the second inner magnetic path. ### Claim 3 (depends on 1) The charged particle beam apparatus according to claim 1, further comprising: a conversion element that is configured to convert a signal detected on the detection surface into an electric signal, wherein the conversion element is disposed between the virtual straight line and the first inner magnetic path. ### Claim 4 (depends on 1) The charged particle beam apparatus according to claim 1, further comprising: a deflector that is configured to deflect the charged particle beams, wherein an inner diameter of the detection surface is in a size equal to or larger than an inner diameter of the deflector. ### Claim 5 (depends on 1) The charged particle beam apparatus according to claim 1, wherein an inner diameter of the detection surface is larger than an inner diameter of the leading end of the magnetic path. ### Claim 6 (depends on 1) The charged particle beam apparatus according to claim 1, further comprising: a deflector that is configured to deflect the charged particle beams, wherein the detection surface is disposed closer to a sample side than the deflector. ### Claim 7 (depends on 1) The charged particle beam apparatus according to claim 1, wherein the detection surface is in a disk shape that includes an opening where the charged particle beams pass, and a side surface of the disk is provided with an element that is configured to convert light obtained by the detection of the charged particles on the detection surface into an electric signal. ### Claim 8 (depends on 1) The charged particle beam apparatus according to claim 1, wherein a positive voltage for accelerating the charged particle beams is applied to the second inner magnetic path. ### Claim 9 (depends on 1) The charged particle beam apparatus according to claim 1, wherein the detection surface is a scintillator, and includes a conversion element that is configured to convert light generated by the scintillator disposed between the virtual straight line and the first inner magnetic path, and an output cable that is configured to transmit an electric signal output from the conversion element to an outside of a vacuum space. ### Claim 10 (depends on 1) The charged particle beam apparatus according to claim 1, wherein the detection surface is divided into a plurality of regions. ### Claim 11 (depends on 10) The charged particle beam apparatus according to claim 10, wherein the plurality of regions are divided in an angular direction. ### Claim 12 (depends on 10) The charged particle beam apparatus according to claim 10, wherein the plurality of regions are divided in a radial direction. ### Claim 13 (depends on 10) The charged particle beam apparatus according to claim 10, wherein the plurality of regions are divided in both an angle direction and a radial direction. ### Claim 14 A charged particle beam apparatus, comprising: an objective lens that is configured to converge charged particle beams emitted from a charged particle source; a detector that is configured to detect charged particles emitted from a sample; and an arithmetic processing unit that is configured to generate an image based on a classification according to energies of the detected charged particles output from the detector. ### Claim 15 (depends on 14) The charged particle beam apparatus according to claim 14, wherein the detector includes a first conversion element that is configured to convert a detected signal into light, and the arithmetic processing unit performs the classification according to intensity of light output from the conversion element. ### Claim 16 (depends on 15) The charged particle beam apparatus according to claim 15, wherein the detector includes a second conversion element that is configured to convert an optical signal output from the conversion element into an electric signal, and the arithmetic processing unit performs the classification according to intensity of the electric signal. ### Claim 17 (depends on 16) The charged particle beam apparatus according to claim 16, wherein the second conversion element is a photodiode or a silicon photomultiplier.