Method for fabricating semiconductor chip by using multi-curing apparatus and multi-curing apparatus

A multi-curing apparatus, comprising:

• an actuator;
• a first chamber comprising a first energy source head;
• a second chamber comprising a second energy source head;
• a first driver gear-engaged with the actuator and the first chamber;
• and
• a second driver gear-engaged with the actuator and the second chamber,
• wherein the first driver comprises:
• a first rotation transmission gear gear-engaged with the actuator;
• a first driving gear disposed on the first rotation transmission gear and gear-engaged with the first chamber;
• a first jog gear disposed on and connected to the first driving gear;
• a first jog that penetrates through the first rotation transmission gear, the first driving gear, and the first jog gear, and that is connected to the first rotation transmission gear;
• and
• a first mechalock removably disposed between the first jog and the first jog gear, and connecting the first jog and the first jog gear to each other,
• wherein the multi-curing apparatus aligns a position of the first chamber with reference to a position of the second chamber by using the first driver,
• wherein the position of the second chamber is fixed while the multi-curing apparatus aligns the position of the first chamber with reference to the position of the second chamber.

A method for fabricating a semiconductor chip, the method comprising:

• providing a first substrate in a first chamber gear-engaged with an actuator via a first driver;
• providing a second substrate in a second chamber gear-engaged with the actuator via a second driver;
• aligning a position of the first chamber with reference to a position of the second chamber by driving the first driver with the second driver being fixed;
• and
• curing the first substrate and the second substrate respectively,
• wherein the first driver comprises a first rotation transmission gear gear-engaged with the actuator and a first driving gear gear-engaged with the first chamber, and
• the second driver comprises a second rotation transmission gear gear-engaged with the actuator and a second driving gear gear-engaged with the second chamber.