Thermal chamber exhaust structure and method

A thermal chamber system comprising:

• a thermal chamber configured to contain a gas;
• a support structure configured to support a substrate in the thermal chamber, the substrate being configured to emit one or more vapors in the thermal chamber;
• and
• an exhaust structure coupled to the thermal chamber, the exhaust structure comprising:
• an intake section wherein the intake section includes an inlet, the inlet being configured to receive the one or more vapors from the thermal chamber;
• an output section coupled to the intake section wherein the output section includes an outlet, the outlet being configured to expel the one or more vapors from the exhaust structure;
• and
• a plurality of smoothing layers configured to transport the one or more vapors from the inlet to the outlet, wherein the smoothing layers are arranged to have inner surfaces defining a first inner diameter of the intake section and a second inner diameter of the output section.