Creating Defect Samples for Array Regions

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for creating a sample of defects detected on a specimen, wherein the computer-implemented method comprises:

• detecting defects on a specimen based on output generated by a detector of an output acquisition subsystem, wherein the output acquisition subsystem comprises at least an energy source and the detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate the output responsive to the detected energy;
• for the defects detected in an array region on the specimen, wherein the array region includes multiple array cell types, stacking information for the defects based on the multiple array cell types, wherein the stacking comprises overlaying design information for only a first of the multiple array cell types with the information for only the defects detected in the first of the multiple array cell types, and wherein the information for only the defects detected in the first of the multiple array cell types comprises positions of the defects within the first of the multiple array cell types;
• selecting a portion of the detected defects based on results of the stacking thereby creating a sample of the detected defects;
• and
• generating defect sample results based on the selected portion of the detected defects and the information for the selected portion of the detected defects.

A computer-implemented method for creating a sample of defects detected on a specimen, comprising:

• detecting defects on a specimen based on output generated by a detector of an output acquisition subsystem, wherein the output acquisition subsystem comprises at least an energy source and the detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate the output responsive to the detected energy;
• for the defects detected in an array region on the specimen, wherein the array region includes multiple array cell types, stacking information for the defects based on the multiple array cell types, wherein the stacking comprises overlaying design information for only a first of the multiple array cell types with the information for only the defects detected in the first of the multiple array cell types, and wherein the information for only the defects detected in the first of the multiple array cell types comprises positions of the defects within the first of the multiple array cell types;
• selecting a portion of the detected defects based on results of the stacking thereby creating a sample of the detected defects;
• and
• generating defect sample results based on the selected portion of the detected defects and the information for the selected portion of the detected defects, wherein steps of the method are performed by one or more computer subsystems coupled to the output acquisition subsystem.