Mems structure and method for detecting a change in a parameter
AssigneeInfineon Technologies AG
InventorsReinhard Hainisch, Thomas Grille
Life of this patent
Estimating the term…
Abstract
A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.
Claims18
A MEMS structure, comprising:
- a latch;
- a first lever designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place;
- and
- a second lever designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.
A method for detecting a change in a parameter, comprising:
- flexing of a first lever in order to move past a latch if the parameter changes in a first direction above a first limit value;
- latching in place of the first lever at the latch if the parameter subsequently changes in a second direction different from the first direction;
- flexing of a second lever in order to move past the first lever if the parameter changes in the second direction above a second limit value;
- and
- latching in place of the second lever at the first lever if the parameter changes in the first direction after the change in the second direction.
Dependencies are inferred from the claim text.