Galvanometer Drive with Multi-Layer Permanent Magnets

Abstract

The invention relates to a galvanometer drive comprising a rotor (3) which is rotatable about a rotational axis (2) and is formed, at least in one section, by a permanent magnet (4), and a stator (5) which surrounds the permanent magnet (4) and includes a coil. According to the invention, the permanent magnet (4) comprises at least two magnetic layers (10) and at least one electrically insulating intermediate layer (11) arranged between the two magnetic layers (10). Moreover, the invention relates to a manufacturing method for a rotor (3) of a galvanometer drive (1), which is designed as a permanent magnet (4). According to the invention, multiple magnetic layers (10) are connected to one another in an integrally joined manner to form a blank and/or the outer contour of the blank is subsequently reworked, in particular mechanically, in order to form the rotor. The invention also relates to a deflection unit for deflecting a laser beam, comprising an optical deflection element, in particular a mirror, and comprising a galvanometer drive (1) connected to the optical deflection element, with the aid of which the deflection element is bidirectionally rotatable through a limited rotation range.

Dependencies are inferred from the claim text.