Fluid synthesis system
AssigneeNikon Corporation
InventorsTakashi Nagata, Ting-Chien Teng, Nobutaka Magome, Bausan Yuan
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Abstract
Fluid synthesis system and corresponding method for synthesis of slurry containing abrasive particles. The system and method are configured to substantially segregate the abrasive particles passing through the filter, used at the filtering step of the process, from the sticky components that clog such filter prior to the filtering step of the synthesis process to achieve a sustaining filtration of the slurry as a result of which the filter remains substantially unclogged for the whole predetermined duration of the filtering process.
Claims12
A method for manufacturing abrasive slurry with a slurry synthesis system, the method comprising:
- in a dispersing portion of said system, forming a first suspension of material, the first suspension containing abrasive solid particles in a fluid medium;
- in a segregating portion of said system, segregating viscous components contained in said first suspension from said first suspension to form a second suspension of the abrasive solid particles in said fluid medium;
- and
- in a filtration portion of said system, filtering the second suspension by passing the second suspension through at least one filter to remove particles with dimensions exceeding threshold dimensions.
Dependencies are inferred from the claim text.