PREPARATION OF Si-H CONTAINING IODOSILANES VIA HALIDE EXCHANGE REACTION
AssigneeL'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude
InventorsCole RITTER, Gennadiy Itov, Manish Khandelwal, Jean-Marc Girard, Glenn Kuchenbeiser, Sean Kerrigan, Peng Zhang, Larry Kit-wing Leung, Nicolas Blasco
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Abstract
Methods of synthesizing Si—H containing iodosilanes, such as diiodosilane or pentaiododisilane, using a halide exchange reaction are disclosed.
Claims9
A method of synthesizing a Si—H containing iodosilane having the formula SiwHxIz or N(SiHaIc)3, wherein w=1 to 3, x+z=2w+2, x=1 to 2w+1, z=1 to 2w+1, each a is independently 0 to 3, each c is independently 0 to 3, a+c=3, provided that at least one a is 1 and at least one c is 1, the method comprising:
- contacting a halosilane reactant having the formula SiwHxXz or N(SiHaXc)3, wherein X is Cl or Br, and w, x, z, a, and c are as defined above, with an alkali metal halide reactant having the formula MI, wherein M is Li, Na, K, Rb, or Cs, to produce a combination of MX and SiwHxIz or N(SiHaIc)3;
- and
- isolating the mixture to produce the Si—H containing iodosilane having the formula SiwHxIz or N(SiHaIc)3.
A Si-containing film forming composition delivery device comprising:
- a canister having an inlet conduit and an outlet conduit and containing a Si-containing film forming composition, the Si-containing film forming composition comprising a Si—H containing iodosilane and between approximately 0 ppbw and approximately 100 ppbw Ag, Cu, or Sb;
- the Si—H containing iodosilane having the formula:
- SiwHxRyIz (1)
- N(SiHaRbIc)3 (2) or
- (SiHmRnIo)2—CH2 (3)
- wherein w is 1 to 3, x+y+z=2w+2, x is 1 to 2w+1, y is 0 to 2w+1, z is 1 to 2w+1, each a is independently 0 to 3, each b is independently 0 to 3, each c is independently 0 to 3, a+b+c=3 provided that at least one a and at least one c is 1, each m is independently 0 to 3, each n is independently 0 to 3, each o is independently 0 to 3, m+n+o=3 provided that at least one m and at least one o is 1, and each R is independently a C1 to C12 hydrocarbyl group, Cl, Br, or a ER′3 group, wherein each E is independently Si or Ge and each R′ is independently H or a C1 to C12 hydrocarbyl group.
Dependencies are inferred from the claim text.