Supercritical-state cleaning system and methods
AssigneeShanghai Yibai Industrial Furnaces Co., Ltd.
InventorsFan Yang, Jingfeng Yang
Life of this patent
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Abstract
Disclosed is a supercritical-state cleaning system, comprising a cleaning chamber, a gas booster apparatus, a first heating apparatus, and a carbon dioxide supply apparatus. The cleaning chamber is separately connected to the first heating apparatus and the carbon dioxide supply apparatus. A vacuum pump set is connected to the cleaning chamber. Compared with the prior art, in the Invention, air introduced when a workpiece enters a cleaning chamber is completely removed, so as to prevent mixing of CO2 and air, thereby improving a cleaning effect.
Claims2
A cleaning method using a supercritical-state cleaning system, comprising the following steps:
- S1. starting a vacuum pump set to vacuumize a cleaning chamber in which a target workpiece is placed;
- S2. after a vacuum degree in the cleaning chamber satisfies a set requirement, turning off the vacuum pump set;
- S3. making carbon dioxide in a storage tank pass through a buffer tank to enter the cleaning chamber, and starting a gas booster apparatus;
- S4. when a pressure in the cleaning chamber reaches a set pressure, stopping the carbon dioxide from entering the cleaning chamber, turning off a pipe between the cleaning chamber and the outside, and starting a first heating apparatus to reach a set temperature in the cleaning chamber, so that the carbon dioxide enters a supercritical state;
- and
- S5. cleaning the target workpiece by using the carbon dioxide in a supercritical state.
A method for recycling carbon dioxide using the supercritical-state cleaning system, comprising:
- making carbon dioxide in a cleaning chamber pass through a buffer tank to enter a storage tank, wherein a gas booster apparatus keeps the carbon dioxide in the buffer tank in a gaseous state.
Dependencies are inferred from the claim text.